Shape Data Operations for VSB LB Data Conversion Using CAD Tools
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概要
- 論文の詳細を見る
For fast electron beam (EB) data conversion, an improved system of hierarchical process has been constructed. Several functions have been added to hierarchically perform shape data operations with increased efficiency. The added functions aim to cut redundant checks in oversizing, to reduce shape data expansion in array data handling and to speed cell overlap checks. These functions were implemented on a computer-aided design (CAD) system utilizing software tools available on it. The new system was applied to the variable shaped beam (VSB) EB data conversion and demonstrated to have better performance. A 16 Kbit SRAM design, conventionally degenerated near a flat level process, was successfully processed in a hierarchical manner, and performance gains of 1.6 to 3.1 were obtained.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1989-11-20
著者
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Sakamoto Shinji
Toshiba Microelectronics Corporation
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Ikenaga Osamu
Ulsi Research Center Toshiba Corporation
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KOBAYASHI Yuuichi
Semiconductor System Engineering Center
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Takigawa Tadahiro
Ulsi Research Center Toshiba Corp
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Watanabe Susumu
Semiconductor System Engineering Center Toshiba Corporation
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Koyama Kiyomi
Ulsi Research Center Toshiba Corporation
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Ikenaga Osamu
ULSI Research Center, Toshiba Corporation, 1 Komukai-Toshiba cho, Saiwai-ku, Kawasaki 210
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Takigawa Tadahiro
ULSI Research Center, Toshiba Corporation, 1 Komukai-Toshiba cho, Saiwai-ku, Kawasaki 210
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Sakamoto Shinji
Toshiba Micro Electronics Corporation, 1 Komukai-Toshiba cho, Saiwai-ku, Kawasaki 210
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