Large-Area Optical Proximity Correction with a Combination of Rule-Based and Simulation-Based Methods

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-12-30

著者

• Koyama Kiyomi

  Ulsi Research Center Toshiba Corporation

• Yamamoto Kazuko

  Ulsi Research Laboratories Toshiba Corporation

• MIYAMA Sachiko

  ULSI Research Laboratories, Toshiba Corporation

• Miyama Sachiko

  Ulsi Research Laboratories Toshiba Corporation

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• Large-Area Optical Proximity Correction with a Combination of Rule-Based and Simulation-Based Methods
• Shape Data Operations for VSB LB Data Conversion Using CAD Tools

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