Estimation of the Density and Roughness of Thin Monolayer Films by Soft X-Ray Reflectivity Measurements
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概要
- 論文の詳細を見る
Thin monolayer films of molybdenum and carbon were deposited by an electron beam evaporation system equipped with an in situ soft X-ray reflectivity monitoring instrument. The densities of the films were estimated from reflectivity measurements during deposition. The densities of the films were about 20% below the bulk value. It was proved that this film density decrease cannot be ignored in estimating the surface roughness by optical measurements. The rms roughness estimated from reflectivity measurements of the monolayer films by correcting the density was in good agreement with the STM results.
- 社団法人応用物理学会の論文
- 1990-02-20
著者
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Kikuchi Yukiko
Ulsi Research Center Toshiba Corporation
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MORI Ichiro
ULSI Research Center, Toshiba Corporation
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Itoh Masamitsu
Ulsi Research Center Toshiba Corporation
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Takigawa Tadahiro
Ulsi Research Center Toshiba Corp
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Mori Ichiro
Ulsi Research Center Toshiba Corporation
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