Performance Evaluation of Representative Figure Method for Proximity Effect Correction : Electron Beam Lithography

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1992-04-30

著者

• Yamasaki Satoshi

  Joint Research Center For Atom Technology-national Institute For Advanced Interdisciplinary Research

• Yamasaki S

  National Inst. Advanced Interdisciplinary Res. Tsukuba Jpn

• Itoh M

  Institute Of Applied Physics University Of Tsukuba

• Itoh M

  Institute Of Industrial Science University Of Tokyo

• Yamasaki S

  Nec Corp. Kanagawa Jpn

• Abe Takayuki

  Ulsi Research Center Toshiba Corp.

• Itoh M

  Research Laboratory Of Engineering Materials Tokyo Institute Of Technology

• YAMASAKI Shuichi

  Superconducting Sensor Laboratory

• YAMASAKI Satoshi

  ULSI research Center, Toshiba Corp.

• YOSHIKAWA Ryoichi

  ULSI research Center, Toshiba Corp.

• ITOH Masayuki

  Integrated Circuit Advanced Process Engineering Deaprtment, Toshiba Corp.

• SHIGEMITU Fumiaki

  Integrated Circuit Advanced Process Engineering Deaprtment, Toshiba Corp.

• TAKIGAWA Tadahiro

  ULSI research Center, Toshiba Corp.

• Yoshikawa Ryoichi

  Ulsi Research Laboratories Toshiba Corporation

• Takigawa T

  Semiconductor Components Operations Dai Nippon Printing Co. Ltd.

• Takigawa Tadahiro

  Ulsi Research Center Toshiba Corp

• Shigemitsu Fumiaki

  Integrated Circuit Advanced Process Engineering Deaprtment Toshiba Corp.

• Yoshikawa Ryoichi

  Ulsi Research Center Toshiba Corporation

• Yamasaki Satoshi

  ULSI Device Development Laboratories, NEC Corporation

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