Structural Differences between Hydrogenated and Deuterated Amorphous Silicon Films Prepared by Plasma-Enhanced Chemical Vapor Deposition

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1991-02-01

著者

• Yamasaki Satoshi

  Joint Research Center For Atom Technology-national Institute For Advanced Interdisciplinary Research

• Yamasaki S

  National Inst. Advanced Interdisciplinary Res. Tsukuba Jpn

• MATSUDA Akihisa

  Electrotechnical Laboratory

• SUZUKI Atsushi

  Electrotechnical Laboratory

• Yamasaki S

  Joint Res. Center For Atom Technol. (jrcat) Tsukuba Jpn

• Yamasaki S

  Nec Corp. Kanagawa Jpn

• Suzuki A

  Department Of Electrical Engineering And Electronics College Of Engineering Osaka Sangyo University

• HAYAMIZU Kikuko

  National Institute of Materials and Chemical Research

• YAMASAKI Satoshi

  Electrotechnical Laboratory

• YAMASAKI Shuichi

  Superconducting Sensor Laboratory

• MASHIMA Satoshi

  Electrotechnical Laboratory

• MCELHENY Peter

  Electrotechnical Laboratory

• Mashima Satoshi

  Central Glass Technical Center

• Hasezaki Kazuhiro

  Mitsubishi Heavy Industries

• Hasezaki Kazuhiro

  Mitsubishi Heavy Industries Ltd.

• Suzuki Atsushi

  Biodevelopment Division Central Institute Nagoya Seiraku Co. Ltd.

• Suzuki Atsushi

  Department Of Applied Biological Chemistry Faculty Of Agriculture University Of Niigata

• Suzuki Atsushi

  Synthetic Crystal Research Laboratory Faculty Of Engineering Nagoya University

• Suzuki Atsushi

  Department Of Pathology Obstetrics And Gynecology Keio University School Of Medicine

• Suzuki Atsushi

  Department Of Physics School Of Science And Engineering Waseda University

• Suzuki Atsushi

  Basic Research Department Prima Meat Packers Co. Ltd.

• Suzuki Atsushi

  Department Of Applied Biochemistry Faculty Of Agriculture University Of Niigata

• Suzuki A

  Department Of Obstetrics And Gynecology Keio University School Of Medicine

• Mcelheny P

  Electrotechnical Laboratory

• Hayamizu K

  National Institute Of Materials And Chemical Research

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