Very High Hydrogen Dilution Induced Novel Phenomena of Electronic Transport Properties in Hydrogenated Microcrystalline Silicon-Germanium Thin Films Prepared by Plasma Enhanced Chemical Vapor Deposition Method
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概要
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With very high hydrogen diluted silane and germane plasma ($R$: $[\text{H$_{2}$}]/([\text{SiH$_{4}$}]+[\text{GeH$_{4}$}])=100\text{--}500$ sccm), undoped high-quality alloys ($\mu$c-SiGe:H) were prepared in plasma enhanced chemical vapor deposition (PECVD) system with various hydrogen dilutions and substrate temperatures. The microstructures of samples were characterized by X-ray diffraction and micro-Raman scattering spectroscopy. Traveling wave (TW) method was used to investigate the transport properties of these thin films. We found that crystallinity and grain size exerted a big influence on the transport mechanism. Especially with very high hydrogen dilution ($R \succ 300$), both of conductivity and mobility came to decrease and the electronic transport properties degraded, which were different from that of normal $\mu$c-SiGe:H films. These novel phenomena were discussed by strong scattering of the potential barriers between the crystallites.
- 2001-01-15
著者
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MATSUDA Akihisa
Electrotechnical Laboratory
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Ganguly Gautam
Electrotechnical Laboratory
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XU Jun
National Food Research Institute
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CHEN Kunji
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University
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HUANG Xinfan
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University
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Shi Jianjun
National Laboratory Of Solid State Microstructures And Department Of Physics Nanjing University
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Huang Shaoyun
National Laboratory Of Solid State Microstructures And Department Of Physics Nanjing University
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Matsuda Akihisa
Electrotechnical Laboratory, 1-1-4 Umezono Tsukuba, Ibaraki 305, Japan
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Huang Xinfan
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, P. R. China
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Shi Jianjun
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, P. R. China
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Chen Kunji
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, P. R. China
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Chen Kunji
National Laboratory of Microstructures and Department of Physics, Nanjing University, Nanjing 210093, P. R. China
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Xu Jun
National Laboratory of Solid State Microstructures and Department of Physics, Nanjing University, Nanjing 210093, P. R. China
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