Mask Distortion Analysis for the Fabrication of 1 GBit Dynamic Random Access Memories by X-Ray Lithography

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-12-30

著者

• Itoh M

  Institute Of Applied Physics University Of Tsukuba

• Itoh M

  Institute Of Industrial Science University Of Tokyo

• Itoh M

  Research Laboratory Of Engineering Materials Tokyo Institute Of Technology

• Gomei Y

  Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn

• Mitsui S

  Super-fine Sr Lithography Lab. Association Of Super-advanced Electronics Technologies (aset) Co Ntt

• ITOH Masamitsu

  Research and Development Center, Toshiba Corporation

• GOMEI Yoshio

  Research and Development Center, Toshiba Corporation

• MOEL Alberto

  Research and Development Center, Toshiba Corporation

• MITSUI Soichiro

  Research and Development Center, Toshiba Corporation

• Moel Alberto

  Research And Development Center Toshiba Corporation

関連論文

• The MAXI Mission on the ISS : Science and Instruments for Monitoring All-Sky X-Ray Images
• Super-Hard X-Ray Emission from η Carinae Observed with Suzaku
• Suzaku X-Ray Study of an Anomalous Source XSS J12270-4859
• Suzaku Observation of Group of Galaxies NGC 507 : Temperature and Metal Distributions in the Intra-Cluster Medium
• Generation of Phase-Conjugate Wave in a Photorefractive GaP at 633 nm
• Suzaku X-Ray Imaging and Spectroscopy of Cassiopeia A
• The X-Ray Telescope on board ASCA
• Performance Evaluation of Representative Figure Method for Proximity Effect Correction : Electron Beam Lithography
• Performance Evaluation of Representative Figure Method for Proximity Effect Correction
• 研究速報 : RELATIONSHIP BETWEEN OPTICAL DAMAGE THRESHOLD AND RESIDUAL ABSORPTION IN EXCIMER LASER COMPONENTS
• 研究速報 : 0bservation of Thermal Stresses Induced by Laser Irradiation in Transparent Optical Materials
• ASCA Observation of the Supernova Remnant W49B
• Direct Fabrication of Surface Relief Holographic Diffusers in Azobenzene Polymer Films
• Application of Surface Relief Hologram Using Azobenzene Containing Polymer Film
• Holographic Recording and Control of Diffraction Efficiency Using Photoinduced Surface Deformation on Azo-Polymer Films
• Fractional Fringe Order Method Using Fourier Analysis for Absolute Measurement of Block Gauge Thickness
• Phase Retrieval of Phase-Shifting Interferometry with Iterative Least-Squares Fitting Algorithm : Experiments
• Optical Implementation of Entropy Network Mapped from Binary Feature Tree
• The Nature of a Cosmic-Ray Accelerator, CTB 37 B, Observed with Suzaku and Chandra
• Broad-Band Light-Wave Correlation Topography Using Wavelet Transform
• Effects of Mask Line-and-Space Ratio in Replicating near-0.1-μm Patterns in X-Ray Lithography
• Sub-0.15 μm Pattern Replication Using a Low-Contrast X-Ray Mask
• Analysis of Sub-0.15 μm Pattern Replication in Synchrotron Radiation Lithography
• Computer-Generated Holograms Based on the Three-Dimensional Fourier Spectrum
• X-Ray Mask Distortion Induced in Back-Etching Preceding Subtractive Fabrication: Resist and Absorber Stress Effect
• Highly Sensitive and Stress-Free Chemically Amplified Negative Working Resist, TDUR-N9, for 0.1 μm Synchrotron Radiation (SR) Lithography
• Metalorganie Vapor Phase Epitaxy Growth of Be-Doped InP Using Bismethylcyelopentadienyl-Berylium
• Ultra-High Throughput of GaAs and (AlGa)As Layers Grown by Molecular Beam Epitaxy (MBE) with a Specially Designed MBE System
• Optical Entropy Network Mapped from Binary Feature Tree
• Polarization Multi-functional Image Switch for Optical Interconnection and Parallel Processing
• Optical Module for Modified Signed-Digit Computing Based on Bit Plane Encoding and Pattern Operations
• Parallel Modified Signed-Digit Computing for Large-Scale Two Dimensional Data Array
• Magnetic Neutral Loop Discharge (NLD) Plasma and Application to SiO_2 Etching Process
• Dry Etch Process in Magnetic Neutral Loop Discharge Plasma
• Transport Properties of Modulation-Doped Structures Grown by Molecular Beam Epitaxy after Focused Ion Beam Implantation
• Improvement in Optical Transparency of SiC Membrane by Modulating Source Gas Ratio in Chemical Vapor Deposition
• Mask Distortion Analysis for the Fabrication of 1 GBit Dynamic Random Access Memories by X-Ray Lithography
• Study on X-Ray Mask Distortion Applying Direct Bonding to Frame Mounting
• High-Mobility Quantum Wires Fabricated by Ga Focused Ion Beam Shallow Implantation
• The Effects of HCl Added to Chemical Vapor Deposition Source Gases for Producing a SiC X-Ray Mask Membrane : X-Ray Lithography
• The Effects of HCl Added to Chemical Vapor Deposition Source Gases for Producing a SiC X-Ray Mask Membrane
• Synthesis of Superconducting 2223 Compound in the Lead-Added Bi-Sr-Ca-Cu-O System
• Evidence of Sr-Deficiency in Bi_2Sr_Ca_1Cu_2O_8 and Preparation of Stoichiometric Semiconducting Bi_2Sr_2Ca_1Cu_2O_8
• Reproducible Processing for High-T_c Superconducting Tl-Ba-Ca-Cu-O-Phases : Electrical Properties of Condensed Matter
• MAXI GSC Observations of a Spectral State Transition in the Black Hole Candidate XTE J1752-223
• Suzaku Observations of the Supernova Remnant N23 in the Large Magellanic Cloud
• Identification of CXOU J171405.7-381031 as a New Magnetar with XMM-Newton
• Silicon Oxide Deposition into a Hole Using a Focused Ion Beam : Focused Ion Beam Process
• Silicon Oxide Deposition into a Hole Using a Focused Ion Beam
• Development of Spatial Light Modulators with Nonlinear Organic Materials
• Bright X-Ray Flares from the BL Lac Object Markarian 421, Detected with MAXI in 2010 January and February
• A Spectral Study of the Black Hole Candidate XTE J1752-223 in the High/Soft State with MAXI, Suzaku, and Swift
• Peculiarly Narrow SED of GRB 090926B with MAXI and Fermi/GBM
• Revisit of Local X-Ray Luminosity Function of Active Galactic Nuclei with the MAXI Extragalactic Survey
• MAXI GSC Monitoring of the Crab Nebula and Pulsar during the GeV Gamma-Ray Flare in 2010 September
• Long-Term Monitoring of the Black Hole Binary GX 339-4 in the High/Soft State during the 2010 Outburst with MAXI/GSC
• A Large X-Ray Flare from a Single Weak-Lined T Tauri Star TWA-7 Detected with MAXI GSC
• The First MAXI/GSC Catalog in the High Galactic-Latitude Sky
• Suzaku Observation of the Intermediate Polar V1223 Sagittarii
• Near-Infrared and X-Ray Observations of XSS J12270-4859
• Cross Spectral Calibration of Suzaku, XMM-Newton, and Chandra with PKS 2155-304 as an Activity of IACHEC

もっと見る 閉じる

スポンサーリンク