Gomei Y | Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn
スポンサーリンク
概要
関連著者
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Gomei Y
Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn
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Gomei Yoshio
Ulsi Research Center Toshiba Corporation
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Itoh M
Institute Of Applied Physics University Of Tsukuba
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Itoh M
Institute Of Industrial Science University Of Tokyo
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Itoh M
Research Laboratory Of Engineering Materials Tokyo Institute Of Technology
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KOMANO Haruki
Research and Development Center, Toshiba Corporation
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Komano Haruki
Research And Development Center Toshiba Corporation
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GOMEI Yoshio
ULSI Research Center, Toshiba Corporation
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Nomura H
Toshiba Corp. Yokohama Jpn
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Kikuchi Y
Aset Super‐fine Sr Lithography Lab. Kanagawa Jpn
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Kikuchi Yukiko
Aset Super-fine Sr Lithography Laboratory Co Ntt Telecommnications Energy Laboratories
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Kikuchi Yukiko
Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At
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Kikuchi Yukiko
Ulsi Research Center Toshiba Corporation
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NOMURA Hiroshi
ULSI Research Laboratories, Toshiba Corporation
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Nomura H
Laboratory Of Chemistry Department Of Natural Science School Of Science And Technology Tokyo Denki U
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MUROOKA Ken-ichi
Research and Development Center, Toshiba Corporation
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ITOH Masamitsu
Research and Development Center, Toshiba Corporation
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GOMEI Yoshio
Research and Development Center, Toshiba Corporation
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Komano Haruki
Ulsi Research Center Toshiba Corp
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Murooka K
Toshiba Corp. Kawasaki Jpn
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Komeya Katutoshi
Graduate School Of Environment And Information Science Yokohama National University
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Kondo Kazuhiro
Fujitsu Laboratories Ltd.
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Kondo K
Fujitsu Laboratories Ltd.
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KONDO Kenzo
ULSI Research Laboratories, Toshiba Corporation
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HIGASHIKAWA Iwao
ULSI Research Laboratories, Toshiba Corporation
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Mitsui S
Super-fine Sr Lithography Lab. Association Of Super-advanced Electronics Technologies (aset) Co Ntt
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MOEL Alberto
Research and Development Center, Toshiba Corporation
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MITSUI Soichiro
Research and Development Center, Toshiba Corporation
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MUROOKA Ken-ichi
ULSI research Center, Toshiba Corporation
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Higashikawa I
Ulsi Research Laboratories Toshiba Corporation
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Moel Alberto
Research And Development Center Toshiba Corporation
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NAKAMURA Hiroko
ULSI Research Center, Toshiba Corporation
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NORIMATU Kenji
Semiconductor Division, Toshiba Corp.
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Norimatu Kenji
Semiconductor Division Toshiba Corp.
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Nakamura Hiroko
Ulsi Research Center Toshiba Corporation
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ITOH Masamitsu
ULSI Research Center, Toshiba Corporation
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Itoh Masamitsu
Ulsi Research Center Toshiba Corporation
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ITOH Masamitsu
LUIS research Center, Toshiba Corporation
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KOMANO Haruki
LUIS research Center, Toshiba Corporation
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GOMEI Yoahio
LUIS research Center, Toshiba Corporation
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KOMANO Haruki
ULSI Research Center, Toshiba Corporation
著作論文
- Effects of Mask Line-and-Space Ratio in Replicating near-0.1-μm Patterns in X-Ray Lithography
- Sub-0.15 μm Pattern Replication Using a Low-Contrast X-Ray Mask
- Analysis of Sub-0.15 μm Pattern Replication in Synchrotron Radiation Lithography
- Improvement in Optical Transparency of SiC Membrane by Modulating Source Gas Ratio in Chemical Vapor Deposition
- Mask Distortion Analysis for the Fabrication of 1 GBit Dynamic Random Access Memories by X-Ray Lithography
- Study on X-Ray Mask Distortion Applying Direct Bonding to Frame Mounting
- The Effects of HCl Added to Chemical Vapor Deposition Source Gases for Producing a SiC X-Ray Mask Membrane : X-Ray Lithography
- The Effects of HCl Added to Chemical Vapor Deposition Source Gases for Producing a SiC X-Ray Mask Membrane
- Silicon Oxide Deposition into a Hole Using a Focused Ion Beam : Focused Ion Beam Process
- Silicon Oxide Deposition into a Hole Using a Focused Ion Beam