Mitsui S | Super-fine Sr Lithography Lab. Association Of Super-advanced Electronics Technologies (aset) Co Ntt
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概要
- 同名の論文著者
- Super-fine Sr Lithography Lab. Association Of Super-advanced Electronics Technologies (aset) Co Ntt の論文著者
関連著者
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Mitsui S
Super-fine Sr Lithography Lab. Association Of Super-advanced Electronics Technologies (aset) Co Ntt
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YAMASHITA Yoshio
SORTEC Corporation
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Itoh M
Institute Of Applied Physics University Of Tsukuba
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Itoh M
Institute Of Industrial Science University Of Tokyo
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Tsuboi S
Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn
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Yoshida Yoichi
The Institute Of Scientific And Industrial Research Osaka University
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Itoh M
Research Laboratory Of Engineering Materials Tokyo Institute Of Technology
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Yamada Yasusada
Advanced Research Institute Waseda University:advanced Science Research Center Japan Atomic Energy R
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Yamashita Y
Power Supply Materials And Devices Laboratory Corporate R&d Center Toshiba Corporation
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Yamashita Yohachi
Corporate R&d Center Toshiba Corporation
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Yamashita Yohachi
Toshiba Materials & Devices Research Laboratories
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Yamaguchi Yoh-ichi
Hoya Corporation
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TSUBOI Shinji
SORTEC Corporation
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Yamashita Yoshio
Sortec Corporation:(present Address) Oki Electric Industry Co. Ltd.
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Yamashita Yasuharu
Synthetic Crystal Research Laboratory School Of Engineering Nagoya University
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Gomei Y
Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn
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Shoki T
Hoya Corp. Tokyo Jpn
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Shoki Tsutomu
Hoya Corporation Ngl Development Center
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Sonoda Takuji
Optoelectronic And Microwave Devices Laboratory Mitsubishi Electric Corporation
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Takamiya S
Optoelectronic & Microwave Devices Laboratory Mitsubishi Electric Corporation
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ITOH Masamitsu
Research and Development Center, Toshiba Corporation
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GOMEI Yoshio
Research and Development Center, Toshiba Corporation
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MOEL Alberto
Research and Development Center, Toshiba Corporation
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MITSUI Soichiro
Research and Development Center, Toshiba Corporation
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Yamashita Y
Central Research Laboratory Hamamatsu Photonics K.k.
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Moel Alberto
Research And Development Center Toshiba Corporation
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Noda S
Assoc. Super‐advanced Electronics Technol. (aset) Yokohama Jpn
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Noda Shoji
Toyota Central Research And Development Labs
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Suzuki K
Ntt Transmission Systems Lab. Ibaraki Jpn
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Suzuki Kenji
Institute For Materials Research Laboratory Tohoku University
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KIMURA Tatsuya
Optoelectronic and Microwave Devices R&D Laboratory, Mitsubishi Electric Corporation
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MATSUO Tadashi
Toppan Printing Co., Ltd.
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Sonoda Takuji
Optoelectronic and Microwave Devices Laboratory, Mitsubishi Electric Corporation
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Matsuo Tadashi
Toppan Printing Co. Lid.
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Ohta Takayuki
Department Of Electronic Engineering Faculty Of Engineering Osaka University
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Noda S
Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn
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Taguchi Takao
Hoya Corporation:(present Address) Fujitsu Laboratories Ltd.
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OHTA Tsuneaki
Oki Electric Industry Co., Ltd.
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SHOKI Tsutomu
HOYA Corporation
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YOSHIHARA Takuya
NEC Corporation
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MITSUI Soichiro
NEC Corporation
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NODA Shuichi
Toppan Printing Co., Lid.
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SUZUKI Kazuo
SORTEC Corporation
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HOGA Hiroshi
Toppan Printing Co., Lid.
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SUZUKI Katsumi
NEC Corporation
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MITSUI Soichiro
SORTEC Corporation
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Hoga Hiroshi
Toppan Printing Co. Lid.
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Hoga Hiroshi
Oki Electric Industry Co. Ltd.
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Ohta Tsuneaki
Optoelectronics Joint Research Laboratory
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Ohta Tuneaki
Oki Electric Industry Co. Ltd.
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Ohta Tsuneaki
Oki Ekectric Industry Co. Ltd.
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Ohta Tsuneaki
Oki Electric Industry Co. Ltd.
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Noda Shuichi
Association Of Super-advanced Electronics Technologies (aset):(present Address)vlsi R&d Center O
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Noda Syuichi
Oki Electric Industry Co. Ltd.
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Ohta T
Matsushita Electric Industrial Co. Ltd. Osaka Jpn
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Sonoda Takuji
Optoelectronic & Microwave Devices Laboratory Mitsubishi Electric Corporation
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Sonoda Takuji
Optoelectronic & Microwave Devices Lab. Mitsubishi Electric Corporation
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Mitsui Shigeru
Optoelectronic And Microwave Devices Laboratory Mitsubishi Electric Corporation
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Mitsui Shigeru
Optoelectronic & Microwave Devices Laboratory Mitsubishi Electric Corporation
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Kimura Tatsuya
Optoelectronic & Microwave Devices Laboratory Mitsubishi Electric Corporation
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Ishida Takao
Optoelectronic & Microwave Devices Laboratory, Mitsubishi Electric Corporation
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Mihashi Yutaka
Optoelectronic & Microwave Devices Laboratory, Mitsubishi Electric Corporation
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Takamiya Saburo
Optoelectronic & Microwave Devices Laboratory, Mitsubishi Electric Corporation
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SONODA Takuji
Kitaitami Works, Mitsubishi Electric Corp.
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ITO Michihiro
Kitaitami Works, Mitsubishi Electric Corp.
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SEGAWA Kazuaki
Kitaitami Works, Mitsubishi Electric Corp.
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TAKAMIYA Saburo
Kitaitami Works, Mitsubishi Electric Corp.
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MITSUI Shigeru
Kitaitami Works, Mitsubishi Electric Corp.
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Ito Michihiro
Kitaitami Works Mitsubishi Electric Corp.
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Segawa Kazuaki
Kitaitami Works Mitsubishi Electric Corp.
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Mihashi Yutaka
Optoelectronic & Microwave Devices Laboratory Mitsubishi Electric Corporation
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Suzuki K
横浜国大 大学院工学研究院
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鈴木 和夫
横浜大
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Takamiya Saburo
Optoelectronic & Microwave Devices Laboratory Mitsubishi Electric Corporation
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Ohta Takeo
Tokyo-tokushukinzoku And Co
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Ishida Takao
Optoelectronic & Microwave Devices Laboratory Mitsubishi Electric Corporation
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Suzuki Katsurmi
Tamachi Laboratory Superconductivity Research Laboratory Istec
著作論文
- X-Ray Mask Distortion Induced in Back-Etching Preceding Subtractive Fabrication: Resist and Absorber Stress Effect
- Highly Sensitive and Stress-Free Chemically Amplified Negative Working Resist, TDUR-N9, for 0.1 μm Synchrotron Radiation (SR) Lithography
- Metalorganie Vapor Phase Epitaxy Growth of Be-Doped InP Using Bismethylcyelopentadienyl-Berylium
- Ultra-High Throughput of GaAs and (AlGa)As Layers Grown by Molecular Beam Epitaxy (MBE) with a Specially Designed MBE System
- Mask Distortion Analysis for the Fabrication of 1 GBit Dynamic Random Access Memories by X-Ray Lithography
- Study on X-Ray Mask Distortion Applying Direct Bonding to Frame Mounting