NOMURA Hiroshi | ULSI Research Laboratories, Toshiba Corporation

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概要

• 同名の論文著者
• ULSI Research Laboratories, Toshiba Corporationの論文著者

関連著者

• Nomura H

  Toshiba Corp. Yokohama Jpn

• Kikuchi Y

  Aset Super‐fine Sr Lithography Lab. Kanagawa Jpn

• Kikuchi Yukiko

  Aset Super-fine Sr Lithography Laboratory Co Ntt Telecommnications Energy Laboratories

• Kikuchi Yukiko

  Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At

• Kikuchi Yukiko

  Ulsi Research Center Toshiba Corporation

• GOMEI Yoshio

  ULSI Research Center, Toshiba Corporation

• NOMURA Hiroshi

  ULSI Research Laboratories, Toshiba Corporation

• Gomei Y

  Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn

• Gomei Yoshio

  Ulsi Research Center Toshiba Corporation

• Nomura H

  Laboratory Of Chemistry Department Of Natural Science School Of Science And Technology Tokyo Denki U

• Komeya Katutoshi

  Graduate School Of Environment And Information Science Yokohama National University

• Kondo Kazuhiro

  Fujitsu Laboratories Ltd.

• Kondo K

  Fujitsu Laboratories Ltd.

• KONDO Kenzo

  ULSI Research Laboratories, Toshiba Corporation

• HIGASHIKAWA Iwao

  ULSI Research Laboratories, Toshiba Corporation

• Higashikawa I

  Ulsi Research Laboratories Toshiba Corporation

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著作論文

• Effects of Mask Line-and-Space Ratio in Replicating near-0.1-μm Patterns in X-Ray Lithography
• Sub-0.15 μm Pattern Replication Using a Low-Contrast X-Ray Mask
• Analysis of Sub-0.15 μm Pattern Replication in Synchrotron Radiation Lithography

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