NAKAMURA Hiroko | ULSI Research Center, Toshiba Corporation

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概要

• 同名の論文著者
• ULSI Research Center, Toshiba Corporationの論文著者

関連著者

• Komano Haruki

  Ulsi Research Center Toshiba Corp

• NAKAMURA Hiroko

  ULSI Research Center, Toshiba Corporation

• Nakamura Hiroko

  Ulsi Research Center Toshiba Corporation

• Gomei Y

  Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn

• Gomei Yoshio

  Ulsi Research Center Toshiba Corporation

• KOMANO Haruki

  Research and Development Center, Toshiba Corporation

• Komano Haruki

  Research And Development Center Toshiba Corporation

• NORIMATU Kenji

  Semiconductor Division, Toshiba Corp.

• Norimatu Kenji

  Semiconductor Division Toshiba Corp.

• Komano Haruki

  Ulsi Research Center Toshiba Corporation

• Ogasawara Munehiro

  Ulsi Research Center Toshiba Corporation

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著作論文

• Focused Ion Beam Assisted Etching of Quartz in XeF_2 without Transmittance Reduction for Phase Shifting Mask Repair
• Silicon Oxide Deposition into a Hole Using a Focused Ion Beam : Focused Ion Beam Process
• Silicon Oxide Deposition into a Hole Using a Focused Ion Beam

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