Organotin-Containing Resists (TMAR) for X-Ray Lithography

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1990-11-20

著者

• Tanaka Yasuaki

  Ntt Interdisciplinary Research Laboratories

• Tanaka Y

  Tokyo Univ. Agriculture And Technol. Koganei Jpn

• Tanaka Y

  Department Of Materials Science And Technology Science University Of Tokyo

• Kubota S

  Sony Co. Atsugi‐shi Jpn

• Aoyama S

  Lsi R&d Laboratory Mitsubisi Electric Corporation

• Aoyama Satoshi

  Lsi R&d Lab Mitsunishi Electric Corporation

• MAEZAWA Hideki

  Photon Factory, National Laboratory for High Energy Physics

• Kubota S

  Mitsubishi Electirc Corp. Hyogo Jpn

• Kubota Shigeo

  Research Center Sony Corporation

• Maezawa H

  Photon Factory National Laboratory For High Energy Physics

• Maezawa Hideki

  Photon Factory National Laboratory For High Energy Physics

• KOEZUKA Hiroshi

  Materials and Electronic Devices Laboratory, Mitsubishi Electric Corporation

• TANAKA Youko

  Materials and Electronic Devices Lab, .Mitsunishi Electric Corporation

• HORIBE Hideo

  Materials and Electronic Devices Lab, .Mitsunishi Electric Corporation

• KUBOTA Shigeru

  Materials and Electronic Devices Lab, .Mitsunishi Electric Corporation

• YOSHIOKA Nobuyuki

  LSI R&D Lab, Mitsunishi Electric Corporation

• WATAKABE Yaichiroh

  LSI R&D Lab, Mitsubishi Electric Corporation

• Horibe H

  Mitsubishi Electric Corp. Amagasaki Jpn

• Kubota Shigeru

  Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation

• Watakabe Y

  Mitsubishi Electric Corp. Itami

• Koezuka H

  Advanced Technology R&d Center Mitsubishi Electric Corp.

• Koezuka Hiroshi

  Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation

• YOSHIOKA Nobuyuki

  ULSI Laboratory, Mitsubishi Electric Corporation

• Yoshioka N

  Shizuoka Univ. Hamamatsu Jpn

• Yoshioka Nobuyuki

  Lsi R & D Laboratory Mitsubishi Electric Corporation

• Horibe Hideo

  Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation

• Tanaka Yoshihisa

  Department Of Electronics Faculty Of Industrial Arts Kyoto Technical University

関連論文

• Image Formation of Periodic Objects Illuminated by Undulator Radiation in a Zone Plate Microscope
• Adsorption Site Determination by Reflection High-Energy Electron Diffraction Combined with Interface Energy Calculation
• Two Dimensional Structure and Growth Mode of Ultrathin Ce Film on a Mo(110) Surface
• 77 PTPN11 GENE AND NOONAN/LEOPARD SYNDROME, MUTATIONS ANALYSIS AND COMPARISIONS OF THE CLINlCAL FEATURES OF 45 JAPANESE PATIENTS
• Fabrication and Superconducting Properties of AgCu Alloy-Sheathed BiSrCaCuO Oxide Tapes
• In Situ Observations of the Growth Process of C-Axis-Oriented Bi_2Sr_2Ca_1Cu_2O_x Superconducting Phase
• Preparation of YBa_2Cu_3O_y Superconducting Thin Films by Radio-Frequency Plasma Flash Evaporation
• Preparation of YBa_2Cu_3O_y Superconducting Thin Films on Metallic Substrates by Excimer Laser Ablation
• Deposition of YBa_2Cu_3O_y Thin Films on Metallic Substrates by Laser Ablation
• High Critical Current Density in Silver-Sheathed Bi_2Sr_2Ca_1Cu_2Ag_yO_x Tape
• Preparation of High-T_c Y-Ba-Cu-O Films by Three-Target Magnetron Sputtering
• Properties of Pb-Doped Bi-Sr-Ca-Cu-O Superconductors Prepared by the Intermediate Pressing Process
• Improvements in the Current Carrying Capacity in High-T_c BiSrCaCuO Superconductors : Electrical Properties of Condensed Matter
• Preparation of Highly Oriented Microstructure in the (Bi, Pb)-Sr-Ca-Cu-O Sintered Oxide Superconductor : Electrical Properties of Condensed Matter
• New Technique for Preparation of BiSrCaCuO Thin Films with T_c of 100 K and Above : Electrical Properties Condensed Matter
• Sputter Deposition of BiSrCaCuOThin Films : Electrical Properties of Condensed Matter
• Effects of Synthesis Conditions on the Properties of a Superconducting Bi-Sr-Ca-Cu-O System : Electrical Properties of Condensed Matter
• A New High-T_c Oxide Superconductor without a Rare Earth Element : Electrical Properties of Condensed Matter
• Switching Dynamics of Bi_2Sr_2CaCu_2O_ Intrinsic Josephson Junctions : Macroscopic Quantum Tunneling and Self-Heating Effect(Condensed matter: electronic structure and electrical, magnetic, and optical properties)
• A New Ray-Tracing program Cpable of Simulating Insertion-Device Synchrotron Rdiation Sources : Waves, Optics and Quantum Electronics
• Dynamics of Picosecond Laser-Generated Acoustic Waves in Solids : Photoacoustic Spectroscopy
• Surface Transformations in Glass Initiated by Laser-Driven Shock : High Power Ultrasonics
• Explosive Crystallization in Amorphous Silicon Induced by Picosecond High-Power Laser Pulses
• Observation of Undulator Radiation. : I. Operation Studies and Visual Observation
• Comparison between 3p-XPS and 3d-XPS of LaAl_2,CeAl_2 and CeRu_2
• Electron Beam Direct Writing Technologies for 0.3-μm ULSI Devices : Lithography Technology
• Electron Beam Direct Writing Technologies for 0.3-μm ULSI Devices
• Structure Analysis of the Bi_2(Sr,Ca)_3Cu_2O_ Superconducting Crystal Based on the Computer Simulation of HRTEM Images : Condensed Matter
• Twins and Intergrowth Defects in High-T_c Bi-Sr-Ca-Cu-O Superconductor Examined by High-Resolution Electron Microscopy : Electrical Properties of Condensed Matter
• Possible Model of the Modulated Structure in High-T_c Superconductor in a Bi-Sr-Ca-Cu-O System Revealed by High-Resolution Electron Microscopy : Electrical Properties of Condensed Matter
• High-Resolution Electron Microscopy of Modulated Structure in the New High-T_c superconductors of the Bi-Sr-Ca-Cu-O System : Electrical Properties of Condensed Matter
• Initial Measurements from an Ultrashort-Pulse Reflectometer on GAMMA 10
• Application of Wavelet Analysis to Plasma Fluctuation Study on GAMMA 10
• Development of an Ultrashort-Pulse Reflectometer for Density Profile Measurements on GAMMA 10
• Study of α-Sexithienyl Thin Film by Polarized Near Edge X-ray Absorption Fine Structure
• Molecular Oriented Thin Film of Biphenyl-4,4'-dithiol Fabricated by Molecular Beam Deposition Method
• Noncontact Ultrasonic Imaging of Subsurface Defects Using a Laser-Ultrasonic Technique
• Fine Pattern Etching of W-Ti Absorber for X-Ray Mask with Electron Cyclotron Resonance Discharge Plasmas
• X-Ray Mask Fabrication Process Using Cr Mask and ITO Stopper in the Dry Etching of W Absorber
• Synthesis of Bi-Sr-Ca-Cu-O Superconductor by Vacuum Calcination Method : Electrical Properties of Condensed Matter
• Synthesis of Superconductive Oxides by Vacuum Calcination Method : Electrical Properties of Condensed Matter
• F-K XANES Studies of Alkali Fluorides
• F-K XANES Studies of Alkaline-Earth Fluorides
• Feasibility Study on High Data Transfer Rate of 300 Mbit / s with 8-Beam Laser Diode Array
• Readout Wave form Equalization in Pulse-Width-Modulated Optical Recording : High Density Recording
• Readout Waveform Equalization in Pulse-Width-Modulated Optical Recording
• SEM Observation of Ag Crystallites Growing on Graphite Substrate
• Deposition System for SEM "In Situ" Observation of Growing Crystals and the Preliminary Study of Zn Vapor Deposition
• Deep UV Mastering with a Write Compensation Technique Realizing over 20GB/layer Capacity Disc
• Timing Jitter Reduction in a Passively Mode-Locked Fiber Laser
• Generation of Tunable Pulses below 345 fs Using a Passively Mode-Locked Fiber Ring Laser with Bulk Components
• Simulation Study on Phase-Shifting Masks for Isolated Patterns : Photolithography
• Simulation Study on Phase-Shifting Masks for Isolated Patterns
• Organotin-Containing Resists (TMAR) for X-Ray Lithography : Resist Material and Process
• Organotin-Containing Resists (TMAR) for X-Ray Lithography
• Compatible Objective Lens for Blu-ray Disc and Degital Versatile Disc Using Diffractive Optical Element and Phase-Step Element which Corrects both Chromatic and Spherical Aberrations
• Lens Design of Compatible Objective Lens for Blu-ray Disc and Digital Versatile Disk with Diffractive Optical Element and Phase Steps
• Inner Area Aberration Compensating Lens for Compact Disc (Compact Disc-Recordable)-Digital Versatile Disc Compatible Head
• Lens Design for Optical Head Compatible with Compact Disk and Digital Versatile Disk
• Dual Focus Optical Head with a Hologram-Integrated Lens
• Deep UV Mastering Using an All-Solid-State 266 nm Laser for an over 20 GBytes/Layer Capacity Disk
• Properties of Ag-Sheathed Bi-Pb-Sr-Ca-Cu-O Superconducting Tapes Prepared by the Intermediate Pressing Process
• Sputtered W-Ti Film for X-Ray Mask Absorber
• Fabrication of 0.25-μm Pattern on a Membrane Substrate-Based X-Ray Absorber : X-Ray Lithography
• Fabrication of 0.25-μm Patterns on a Membrane Substrate-Based X-Ray Absorber
• Molecular Design of Dissolution Inhibitor in Chemical Amplification Resist System by Molecular Orbital Method : Transparency and Reactivities with "Protons"
• Investigation on Optical Matching of a Soft X-Ray Undulator with Some Condenser Fresnel Zone Plates
• Relationship between Dissolution Inhibitors and Dissolution Rate of Resist in Chemically Amplified Three-Component Positive Resist
• Thermal Contraction of Drawn Polyethylene Film I. An Empirical Equation for Temperature Dependence of Thermal Stress
• Profile-Imaging of Wavy Cleavage Surface of Bi_2Sr_2CaCu_2O_y by High-Resolution Transmission Electron Microscopy
• Multiplet Structures in the L_ Absorption Spectra of 3d Transition-Metal Fluorides
• Device Characteristics of Organic Static Induction Transistor Using Copper Phthalocyanine Films and Al Gate Electrode
• Disk Mastering Process with an All-Solid-State Ultraviolet Laser
• Second-Harmonic Generation Green Laser for Higher-Density Optical Disks
• Diffractive-Refractive Achromatic Lens for Optical Disk System by Glass Molding
• Efficiency Simulation for Diamond-Turned Diffractive Lenses
• Organic Molecular Beam Deposition of α-Sexithienyl
• X-Ray Lithography Using Chlorinated Polymethylstyrene (CPMS) as a Negative X-Ray Resist
• Bound States in Superconductors
• Involvement of canonical Wnt/Wingless signaling in the determination of the positional values within the leg segment of the cricket Gryllus bimaculatus
• Far-Infrared Reflectance and Transmittance Studies of YBa2Cu3O7-x Single-Crystal Thin Films
• Power Spectral Densities of Temporal Variations of Blood Pressures
• A 3-Terminal AT-Cut Quartz Resonator with Shield Electrodes
• 単層ハ-フト-ン型位相シフトマスクによるリソグラフィ-特性〔英文〕
• Effect of Phase Error on Lithographic Characteristics Using Attenuated Phase-Shifting Mask
• Optical Studies of Resonantly Excited Excitonic Molecules in CuCl
• Picosecond Time Analysis of Excitonic Molecule Luminescence Spectra in CuCl
• Tunable Picosecond Pulse Generation by Optical Parametric Oscillator
• Generation of Widely Tunable Pico-Second Pulses by Optical Parametric Effect
• Characteristics of a Field-Effect Transistor Fabricated with Electropolymerized Thin Film : Semiconductors and Semiconductor Devices
• Absorption Spectra of Optically Pumped ZnS:Mn
• High-Speed Contact X-Ray Microscopy with Undulator Radiation
• Rotational Analysis of Second-Positive Emissions in a N_2-SF_6 Laser
• Interpretation on Nitrogen- and Proton-Induced Nuclear Reactions
• Molecular Orientation in Vacuum-Deposited Poly(thiophene) Film Studied by Second-Harmonic Generation
• Thick Bi_2Sr_2CaCu_2O_x Films without Substrates Prepared by Dip-Suspension in Melts
• Disk Mastering Process with an All-Solid-State Ultraviolet Laser
• Synergistic Effect of 1,25-Dihydroxyvitamin D3 and Retinoic Acid in Inducing U937 Cell Differentiation.
• Superficial Spreading-Type Mucosa-Associated Lymphoid Tissue (MALT) Lymphoma in the Stomach. A Case Report.:A Case Report
• Absolute Calibration of a Normal Incidence Vacuum Spectrometer Using Synchrotron Radiation

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