Deep UV Mastering Using an All-Solid-State 266 nm Laser for an over 20 GBytes/Layer Capacity Disk

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-03-30

著者

• Kubota S

  Sony Co. Atsugi‐shi Jpn

• Komeya K

  Graduate School Of Environment And Information Sciences Yokohama National Univ.

• Komeya Katutoshi

  Graduate School Of Environment And Information Science Yokohama National University

• Kubota S

  Mitsubishi Electirc Corp. Hyogo Jpn

• Kubota Shigeo

  Research Center Sony Corporation

• Kondo K

  Tokyo Inst. Technol. Yokohama Jpn

• Aki Y

  Manufacturing Eng. Dev. Ctr. Msnc Sony Corporation

• Kondo K

  Stanley Electric Co. Ltd. Yokohama Jpn

• Kondo Kazuhiro

  Fujitsu Laboratories Ltd.

• Kondo K

  Fujitsu Laboratories Ltd.

• FURUKI Motohiro

  Home Electronics Development Group, Home Electronics Network Company, Sony Corporation

• Aki Yuichi

  Manufacturing Eng. Dev. Ctr., MSNC, Sony Corporation

• Takeda M

  Department Of Chemical And Energy Engineering Graduate School Of Engineering Yokohama National Unive

• Takeda Minoru

  Storage Technologies Department Optical System Development Div. Henc Sony Corporation

• Furuki M

  Storage Technologies Department Optical System Development Div. Henc Sony Corporation

• Aki Yuichi

  Manufacturing Eng. Dev. Ctr. Msnc Sony Corporation

• TAKEDA Minoru

  Giga Byte Laboratories, Sony Corporation

• FURUKI Motohiro

  Giga Byte Laboratories, Sony Corporation

• YAMATSU Hisayuki

  Giga Byte Laboratories, Sony Corporation

• KASHIWAGI Toshiyuki

  Giga Byte Laboratories, Sony Corporation

• SUZUKI Akitoshi

  Manufacturing System Business Center, Sony Corporation

• KONDO Kenji

  Research Center, Sony Corporation

• OKA Michio

  Research Center, Sony Corporation

• Yamatsu Hisayuki

  Giga Byte Laboratories Sony Corporation

• Kashiwagi Toshiyuki

  Giga Byte Laboratories Sony Corporation

• Oka Michio

  Research Center Sony Corporation

• Suzuki Akitoshi

  Manufacturing System Business Center Sony Corporation

• TAKEDA Minoru

  Division of Materials Science and Chemical Engineering, Graduate School of Engineering, Yokohama National University

• TAKEDA Minoru

  Department of Physics, Tokai University

関連論文

• Effects of starting composition and carbon content on the formation of Ca-α SiAlON powders by carbothermal reduction–nitridation
• Recent H-mode Results on ECH Plasmas in Heliotron J
• Highly Uniform Si-Doped GaAs Epitaxial Layers Grown by MBE Using a TEG, Arsenic, and Silicon System
• Substrate Temperature Dependence of Carbon Incorporation into GaAs Grown by MBE Using Triethylgallium and As_4
• Highly Uniform, High-Purity GaAs Epitaxial Layer Grown by MBE Using Triethylgallium and Arsenic : Semiconductors and Semiconductor Devices
• GaAs Surface Cleaning with HCl Gas and Hydrogen Mixture for Molecular-Beam-Epitaxial Growth : Semiconductors and Semiconductor Devices
• Effect of Thermal Etching on GaAs Substrate in Molecular Beam Epitaxy
• Threshold Behavior of a Bistable Ferroelectric Liquid Crystal with a Large Tilt Angle in Thick Cells (4-14μm) : Condensed matter
• New Room-Temperature Ferroelectric Liquid Crystals : Material Constants and Electro-Optic Properties
• Low-Frequency Waves in SF_6 Positive Columns Diluted with N_2 Gas
• Fracture Resistance and Contact Damage of TiN Particle Reinforced Si_3N_4 Ceramics(Properties (structural and functional),Guest Editors Dedicated to Prof. Gunter Petzow: Modern Trends in Advanced Ceramics)
• Spectroscopy of Hard X-Rays (2-15 keV) Generated by Focusing Femtosecond Laser on Metal Targets
• Tunneling Hot Electron Transistor Using GaAs/AlGaAs Heterojunctions
• Raman Scattering Studies of CuInS_2 Films Grown by RF Ion Plating
• Low-Temperature Deposition of CuIn(S_xSe_)_2 Thin Films by Ionized Cluster Beam Technique
• Growth and Characterization of CuInS_2 Films grown by Rf Ion-Plating
• Hard X-Ray Emission from a Copper Target by Focusing a Picosecond Laser Beam at 3×10^W/cm^2
• Changes in Microstructure of Activated Carbons Introduced by Heat Treatment
• Effect of H_2 on the Quality of Si-Doped Al_xGa_As Grown by MBE
• NMR study on the formation mechanism of β-SiAlON from zeolite by nitridation using ammonia gas
• Initial Measurements from an Ultrashort-Pulse Reflectometer on GAMMA 10
• Application of Wavelet Analysis to Plasma Fluctuation Study on GAMMA 10
• Development of an Ultrashort-Pulse Reflectometer for Density Profile Measurements on GAMMA 10
• Influence of MBE Growth Conditions on Persistent Photoconductivily Effects in N-AlGaAs and Selectively Doped GaAs/AlGaAs Heterostructures
• Evaluation of Replicated Dynamic Random Access Memory Cell Patterns using X-Ray Lithography
• Effects of Mask Line-and-Space Ratio in Replicating near-0.1-μm Patterns in X-Ray Lithography
• Analysis of Sub-0.15 μm Pattern Replication in Synchrotron Radiation Lithography
• MBE Growth of High-Quality GaAs Using Triethylgallium as a Gallium Source
• Selectively Doped GaAs/ N-Al_Ga_As Heterostructures Grown by Gas-Source MBE : Semiconductors and Semiconductor Devices
• High-Density Near-Field Optical Disc Recording
• EB Mastering Process for SIL Readout/Recording System(Nano-Fabrication and Patterned Media)
• Progress in Electron Beam Mastering of 100Gbit/inch^2 Density Disc
• Readout Method for Read Only Memory Signal and Air Gap Control Signal in a Near Field Optical Disc System
• Near-Field Optical Head for Disc Mastering Process
• Deep UV Mastering with a Write Compensation Technique Realizing over 20GB/layer Capacity Disc
• Correlation Between Bulk Orderings and Anchoring Structures of Liquid Crystals Studied by Scanning Tunneling Microscopy
• Two Types of Anchoring Structure in Smectic Liquid Crystal Molecules
• Picosecond Pulsed X-Ray Diffraction from a Pulsed Laser Heated Si(111)
• Time-Resolved X-ray Shadowgraphy Experiment of Laser Ablation of Aluminum using Laser-Induced Picosecond Pulsed X-rays
• Spall behavior of steels under hypervelocity impact
• Laser-Induced Shock Compression of Tantalum to 1.7 TPa
• A Study of the Sustaining Mechanism in an Inductively Coupled Plasma ( Plasma Processing)
• Organotin-Containing Resists (TMAR) for X-Ray Lithography : Resist Material and Process
• Organotin-Containing Resists (TMAR) for X-Ray Lithography
• Anchoring Structure of Binary Mixture of Liquid Crystals Studied by Scanning Tunneling Microscopy
• Ionization Coefficient in Gases under Nonuniform Electric Fields
• Deep UV Mastering Using an All-Solid-State 266 nm Laser for an over 20 GBytes/Layer Capacity Disk
• Quantum Theory of Massive Yang-Mills Fields. II : Gauge Covariance
• Quantum Theory of Massive Yang-Mills Fields. I : Basis of Formulation with Indefinite Metric
• Gauge Covariance in Non-Abelian Gauge Theories
• On Finite Local Gauge Transformations in a Yang-Mills Field Theory with Invariant Gauge-Families
• EN-P32 Bacterial diversity and mechanism of drinking water treatment using bio-filtration for removal of iron and manganese from groundwater(Section VI Environmental Biotechnology)
• Removal of Mn^ from water by "aged" biofilter media : The role of catalytic oxides layers(ENVIRONMENTAL BIOTECHNOLOGY)
• A Novel Gene Encoding an Enzyme That Degrades a Polysaccharide from the Sheath of Sphaerotilus natans(Biochemistry & Molecular Biology)
• Structural Analysis of the Extracellular Polysaccharide Produced by Sphaerotilus natans(Biochemistry & Molecular Biology)
• Commensal Relationship Between a Sheath-forming Bacterium, Sphaerotilus natans, and a Sheath-degrading Bacterium, Paenibacillus sp.(Microbiology & Fermentation Technology)
• Cloning and Expression of the Gene Encoding Thermostable Poly(3-Hydroxybutyrate) Depolymerase
• Isolation and Chemical Composition of the Sheath of Sphaerotilus natans
• Thermostable Poly(3-hydroxybutyrate)Depolymerase of a Thermophilic Strain of Leptothrix sp.Isolated from a Hot Spring
• Factors Affecting the Activity of a Protein Bioflocculant Produced by Nocardia amarae
• Electron Beam Recording with a Novel Differential Pumping Head Realizing More than 50 GB/Layer Capacity Disc
• Enhancement of X-ray Enlission from a Cooled Kr Gas Jet Irradiated by an Ultrashort KrF Laser Pulse : Nuclear Sciences, Plasmas, and Electric Discharges
• Luminescence in β-ZnP_2 at Low Temperatures : Intersystem Spin Conversion of Exciton Polaritons : Condensed Matter: Electronic Properties, etc.
• Laser Wakefield in Low Density Plasma : Fluids, Plasmas, and Electric Discharges
• Si Atomic-Planar-Doping in GaAs Made by Molecular Beam Epitaxy
• A New Heterostructure for 2DEG System with a Si Atomic-Planar-Doped AlAs-GaAs-AlAs Quantum Well Structure Grown by MBE
• Picosecond Time-Resolved X-ray Diffraction from a Laser-Shocked Germanium Crystal above Hugoniot Elastic Limit
• Picosecond Time-Resolved X-Ray Diffraction of a Photoexcited Silicon Crystal (Short Note)
• Shock-Induced Electromotive Force in Aqueous Solution of Potassium Fluoride
• Picosecond Time-Resolved X-Ray Diffraction from Si(111) under High-Power Laser Irradiation
• Modeling of the electron kinetics in proportional counters
• 衝撃圧縮法によるSm_2Fe_N_3焼結磁石の作製
• A Samarium-Iron Nitride Magnet Fabricated by Shock-Compaction Technique
• In-Situ Counting of Process-Induced Particles
• Drift Velocities of Electron Swarms in Methane : A Multi-Term Boltzmann Equation Analysis
• Particle Counting in Semiconductor Processing Gas and Apparatus with a New Flow-Cell-Type Laser Particle Counter
• Nitrogen Absorption by Sm_2Fe_(Guest Editors Dedicated to Prof. Gunter Petzow: Modern Trends in Advanced Ceramics)
• Sm_2Fe_-N系のP-C-T特性
• Sm_2Fe_中の窒素の拡散挙動
• Fabrication and wear properties of TiN nanoparticle-dispersed Si_3N_4 ceramics(SiAlons and Non-oxides)
• Influence of coarse particles on microstructure of aluminum nitride sintered body
• Electric Double Layer Capacitor Characteristics of Carbon Blacks Activated by Potassium Hydroxide
• Synthesis of β-SiAlON from a zeolite by reduction nitridation in a mixture of NH_3-C_3H_8
• Disk Mastering Process with an All-Solid-State Ultraviolet Laser
• Second-Harmonic Generation Green Laser for Higher-Density Optical Disks
• Effect of Oxygen Partial Pressure during Firing on Electrical Properties of Splintered Body Composed of Mn_CoNi_O_4 : Structure and Mechanical and Thermal Properties of Condensed Matter
• Dependence of Light-Leakage Caused by Spherical Spacers on Liquid Crystal Mixture in Super Twisted nematic Liquid Crystal Displays
• High-Density Near-Field Readout Using Solid Immersion Lens Made of KTaO3 Monocrystal
• High-Density Near-Field Readout Using Diamond Solid Immersion Lens
• Deformation of the Liquid Oxygen Meniscus Induced by Magnetic Field
• Preparation and Electrical Properties of Sintered Bodies Composed of Monophase Spinel Mn_Co_Ni_O_4 (0 ≦ X ≦ 1) Derived from Rock-Salt-Type Oxides
• Sm_2Fe_合金の水素吸収特性
• Shock Compaction of an Acicular Iron-Alloy Powder to Produce a Nanocrystalline Magnet
• Identification and Characterization of a Mycobacterial (2R,3R)-2,3-Butanediol Dehydrogenase
• Effects of Preparation Parameters on EDLC Performance of the Chars from Phenol-resin Prepolymers Containing Ferrocene and Polyethylene Glycols : Part II : Effect of Amount of Polymer Blends
• Effects of Preparation Parameters on EDLC Performance of the Chars from Phenol-resin Prepolymers Containing Ferrocene and Polyethylene Glycols : Part I : Effects of the Molecular Weight of Polyethylene Glycol and the Carbonization Temperature
• Effects of Preparation Parameters on EDLC Performance of the Chars from Phenol-resin Prepolymers Containing Ferrocene and Polyethylene Glycols : Part III : Effect of Heating Rate
• Progress in Electron Beam Mastering of 100 Gbit/inch2 Density Disc
• Disk Mastering Process with an All-Solid-State Ultraviolet Laser

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