EB Mastering Process for SIL Readout/Recording System(Nano-Fabrication and Patterned Media)

概要

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We improved the electron beam recorder with a differential pumping head for higher density discs and mass production. The beam diameters were improved by changing the aperture size of the objective lens, and beam stability was also improved by adding a sound proof case. As for the performance of the improved electron beam recorder, we have demonstrated the capability of 70Gb/in^2 density recording by an electron beam mastering process and readout by a solid-immersion lens with a blue LD of 405nm wavelength and 2.05NA. In addition, we improved the pit width uniformity by introducing an appropriate write strategy that was simulated by a Monte Carlo simulation to the recording pulses. Thus we were able to fabricate from a 104Gb/in^2 to 150Gb/in^2 ROM disc by using the write strategy. For the solid-immersion lens recording system with the blue LD and 1.84NA, we obtained the clear eye patterns of 73Gb/in^2 in which the groove track pitch is 160nm by utilizing a phase change recording media and a polycarbonate substrate.
社団法人日本磁気学会の論文
2004-11-01