水晶振動子を用いたバイブロスキャニング法による非導電体の微細形状計測

概要

論文の詳細を見る
Vibroscanning (VS) method can be a valuable tool for profile measurement of high aspect ratio micro parts such as micro holes. Its limitation still arises from the measurement principle, which assumes sample's electric conductivity. To overcome the limitation, a new VS sensor, which combines a VS probe and an off-the-shelf quartz tuning fork, has been developed. In the development, specific problems in applying the long thin VS probe to the quartz tuning fork were clarified. Thereafter, the new sensor construction and assembly process is proposed. The sensor's theoretical model was introduced and the model's validity and limitation were examined through experiments. Sample measurements were carried out after incorporating the new VS sensor into the measurement system, which has XYZ-axis mechanical stages and a PZT micro positioner. Measurement repeatability of better than ±0.2μm was confirmed in block gauge surface measurements. Three-dimensional rendering of roughness gauge surface measurement was successfully obtained, which clearly showed the surface topology. These results prove the usefulness of the new VS sensor, which has overcome the limitation of the conventional VS method.
社団法人精密工学会の論文
2001-06-05