バイブロスキャニング法の微細放電加工機への実装検討 : 微細放電加工機上での微細加工形状のオンマシン測定の試み

概要

論文の詳細を見る
Micro electro-discharge machining has suitable properties for micro hole and slit. However, it has been difficult to guarantee the machining quality due to the lack of evaluation methodology. Vibroscanning method, originally invented at the Univertsity of Tokyo, can measure the inner profile of micro holes nondestructively. By utilizing the vibroscanning measurement probe, on-the-machine measurement setup of micro EDM has been built. In the experiment, inner profile of EDMed micro hole was clearly observed and its accuracy was proved to be better than 1μm. Two-dimensional vibroscanning method has also been developed, which indicates the possibility of full three-dimensional evaluation of micro holes.
社団法人精密工学会の論文
2000-11-05