バイブロスキャニング法を用いた微細形状測定システムの開発

概要

論文の詳細を見る
Vibroscannning method (VS) can be a valuable tool for on-the-machine measurement of micro holes. There still exist some problems : measurement speed, measurement accuracy, measurement of arbitrary shape and ease of operation. The first two problems have been solved through a development of a new VS measurement head, which employs a fast positioning stage with a sensor feedback. The measurement head always keeps the VS probe contacted to the measured surface within a range of 80 μm. The remaining problems have been solved by a new measurement system equipped with an ultra precise rotary table and a teaching microscope. The rotary table makes the probe contact to arbitrarily shaped measurement surface at rigllt angle. With the teaching microscope, users can instruct the system on the measurement region in advance and an automatic measurement system is realized without any fear of damaging the probe. The system's usefulness has been tested through measurements of micro holes with horizontal and vertical non-destructive cross sectioning.
社団法人精密工学会の論文
2001-02-05