Progress in Electron Beam Mastering of 100 Gbit/inch2 Density Disc
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概要
- 論文の詳細を見る
We developed an electron beam recorder (EBR) capable of recording master discs under atmospheric conditions using a novel differential pumping head. Using the EBR and optimized fabrication process for Si-etched discs with reactive ion etching (RIE), a bottom signal jitter of 9.6% was obtained from a 36 Gbit/inch2 density disc, readout using a near-field optical pickup with an effective numerical aperture (NA) of 1.85 and a wavelength of 405 nm. We also obtained the eye patterns from a 70 Gbit/inch2 density disc readout using an optical pickup with a 2.05 NA and the same wavelength, and showed almost the same modulation ratio as the simulation value. Moreover, the capability of producing pit patterns corresponding to a 104 Gbit/inch2 density is demonstrated.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-07-15
著者
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TAKEDA Minoru
Optical System Development Group, HENC, Sony Corporation
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FURUKI Motohiro
Optical System Development Group, HENC, Sony Corporation
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YAMAMOTO Masanobu
Optical System Development Group, HENC, Sony Corporation
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KAWASE Hiroshi
Manufacturing Eng. Dev., Ctr., MSNC, Sony Corporation
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MUTOU Masao
Advanced Technology Div., JEOL Ltd.
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Aki Yuichi
Manufacturing Eng. Dev. Ctr. Msnc Sony Corporation
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Handa Nobuo
Advanced Technology Div. Jeol Ltd.
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Koizumi Mitsuru
Advanced Technology Div. Jeol Ltd.
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Miyokawa Toshiaki
Advanced Technology Div. Jeol Ltd.
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Saito Kimihiro
Optical Disc Development Division Av/it Development Group Sony Corporation
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Shinoda Masataka
Optical Disc Development Division Av/it Development Group Sony Corporation
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Handa Nobuo
Advanced Technology Div., JEOL Ltd., 3-1-2 Musashino, Akishima-shi, Tokyo 196-8558, Japan
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Yamamoto Masanobu
Optical System Development Group, HENC, Sony Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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Yamamoto Masanobu
Optical Storage Laboratory, Material Laboratories, Sony Corporation, 6-7-35, Kitashinagawa Shinagawa-ku, Tokyo 141-0001, Japan
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Furuki Motohiro
Optical System Development Division, Home Electronics Development Group, Sony Corporation Home Electronics Network Company, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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Kawase Hiroshi
Manufacturing Eng. Dev., Ctr., MSNC, Sony Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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Shinoda Masataka
Optical System Development Group, HENC, Sony Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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Miyokawa Toshiaki
Advanced Technology Div., JEOL Ltd., 3-1-2 Musashino, Akishima-shi, Tokyo 196-8558, Japan
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Aki Yuichi
Manufacturing Eng. Dev., Ctr., MSNC, Sony Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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Koizumi Mitsuru
Advanced Technology Div., JEOL Ltd., 3-1-2 Musashino, Akishima-shi, Tokyo 196-8558, Japan
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Saito Kimihiro
Optical System Development Group, HENC, Sony Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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Takeda Minoru
Optical System Development Group, HENC, Sony Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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Yamamoto Masanobu
Optical Disc Development Division, AV/IT Development Group, Sony Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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Furuki Motohiro
Optical Disc Development Division, AV/IT Development Group, Sony Corporation, 6-7-35 Kitashinagawa, Shinagawa-ku, Tokyo 141-0001, Japan
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