Electron Beam Recording with a Novel Differential Pumping Head Realizing More than 50 GB/Layer Capacity Disc

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EB Mastering Process for SIL Readout/Recording System(Nano-Fabrication and Patterned Media)
Progress in Electron Beam Mastering of 100Gbit/inch^2 Density Disc
Deep UV Mastering Using an All-Solid-State 266 nm Laser for an over 20 GBytes/Layer Capacity Disk
Electron Beam Recording with a Novel Differential Pumping Head Realizing More than 50 GB/Layer Capacity Disc
Progress in Electron Beam Mastering of 100 Gbit/inch2 Density Disc
Electron Beam Recording with a Novel Differential Pumping Head Realizing More than 50 GB/Layer Capacity Disc

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