Organotin-Containing Resists (TMAR) for X-Ray Lithography : Resist Material and Process

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1991-01-31

著者

• Tanaka Yasuaki

  Ntt Interdisciplinary Research Laboratories

• Tanaka Y

  Tokyo Univ. Agriculture And Technol. Koganei Jpn

• Tanaka Y

  Department Of Materials Science And Technology Science University Of Tokyo

• Kubota S

  Sony Co. Atsugi‐shi Jpn

• Aoyama S

  Lsi R&d Laboratory Mitsubisi Electric Corporation

• Aoyama Satoshi

  Lsi R&d Lab Mitsunishi Electric Corporation

• Kubota S

  Mitsubishi Electirc Corp. Hyogo Jpn

• Kubota Shigeo

  Research Center Sony Corporation

• Maezawa H

  Photon Factory National Laboratory For High Energy Physics

• KOEZUKA Hiroshi

  Materials and Electronic Devices Laboratory, Mitsubishi Electric Corporation

• TANAKA Youko

  Materials and Electronic Devices Lab, .Mitsunishi Electric Corporation

• HORIBE Hideo

  Materials and Electronic Devices Lab, .Mitsunishi Electric Corporation

• KUBOTA Shigeru

  Materials and Electronic Devices Lab, .Mitsunishi Electric Corporation

• YOSHIOKA Nobuyuki

  LSI R&D Lab, Mitsunishi Electric Corporation

• WATAKABE Yaichioh

  LSI R&D Lab, Mitsunishi Electric Corporation

• MAEZAKI Hideki

  Photon Factory, National Laboratory for High Energy Physics

• Horibe H

  Mitsubishi Electric Corp. Amagasaki Jpn

• Kubota Shigeru

  Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation

• Watakabe Y

  Mitsubishi Electric Corp. Itami

• Koezuka H

  Advanced Technology R&d Center Mitsubishi Electric Corp.

• Koezuka Hiroshi

  Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation

• YOSHIOKA Nobuyuki

  ULSI Laboratory, Mitsubishi Electric Corporation

• Yoshioka N

  Shizuoka Univ. Hamamatsu Jpn

• Yoshioka Nobuyuki

  Lsi R & D Laboratory Mitsubishi Electric Corporation

• Horibe Hideo

  Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation

• Tanaka Yoshihisa

  Department Of Electronics Faculty Of Industrial Arts Kyoto Technical University

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