Molecular Design of Dissolution Inhibitor in Chemical Amplification Resist System by Molecular Orbital Method : Transparency and Reactivities with "Protons"
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-02-15
著者
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KOEZUKA Hiroshi
Materials and Electronic Devices Laboratory, Mitsubishi Electric Corporation
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Nobutoki Hideharu
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Kumada Teruhiko
Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation
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Nobutoki Hideharu
Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation
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Koezuka Hiroshi
Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation
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