Kumada Teruhiko | Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation
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概要
関連著者
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Kumada Teruhiko
Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation
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KOEZUKA Hiroshi
Materials and Electronic Devices Laboratory, Mitsubishi Electric Corporation
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Nobutoki Hideharu
Advanced Technology R&d Center Mitsubishi Electric Corporation
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HORIBE Hideo
Materials and Electronic Devices Lab, .Mitsunishi Electric Corporation
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KUBOTA Shigeru
Materials and Electronic Devices Lab, .Mitsunishi Electric Corporation
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Kubota Shigeru
Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation
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KIMURA Yoshika
ULSI Laboratory, Mitsubishi Electric Corporation
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Nobutoki Hideharu
Materials & Electronic Devices Laboratory, Mitsubishi Electric Corporation
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Kimura Yoshika
Ulsi Laboratory Mitsubishi Electric Corporation
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Kimura Yoshika
Ulsi Research Laboratory Mitsubishi Electric Corporation
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Koezuka Hiroshi
Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation
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Horibe Hideo
Materials & Electronic Devices Laboratory Mitsubishi Electric Corporation
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Yuichi Muraji
Toray Research Center Inc., 3-3-7 Sonoyama, Otsu 520-8567, Japan
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Terai Mamoru
Materials & Processing Technology Department, Advanced Technology R&D Center, Mitsubishi Electric Corporation, 8-1-1 Tsukaguchihonmachi, Amagasaki, Hyogo 661-8661, Japan
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Hagiwara Takuya
Renesas Technology Corporation, 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan
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Tetsuro Hanawa
Renesas Technology Corporation, 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan
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Tomoyuki Ando
Research & Development Department, Tokyo Ohka Kogyo Co., Ltd., 1590 Tabata, Samukawa, Kanagawa 253-0114, Japan
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Takeshi Matsunobe
Toray Research Center Inc., 3-3-7 Sonoyama, Otsu 520-8567, Japan
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Kazuyuki Okada
Toray Research Center Inc., 3-3-7 Sonoyama, Otsu 520-8567, Japan
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Kazuhiro Yoshikawa
Toray Research Center Inc., 3-3-7 Sonoyama, Otsu 520-8567, Japan
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Naoki Man
Toray Research Center Inc., 3-3-7 Sonoyama, Otsu 520-8567, Japan
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Tomoyuki Ando
Research & Development Department, Tokyo Ohka Kogyo Co., Ltd., 1590 Tabata, Samukawa, Kanagawa 253-0114, Japan
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Takuya Hagiwara
Renesas Technology Corporation, 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan
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Teruhiko Kumada
Materials & Processing Technology Department, Advanced Technology R&D Center, Mitsubishi Electric Corporation, 8-1-1 Tsukaguchihonmachi, Amagasaki, Hyogo 661-8661, Japan
著作論文
- Molecular Design of Dissolution Inhibitor in Chemical Amplification Resist System by Molecular Orbital Method : Transparency and Reactivities with "Protons"
- Relationship between Dissolution Inhibitors and Dissolution Rate of Resist in Chemically Amplified Three-Component Positive Resist
- Immersion-Specific Defects of High-Receding-Angle Topcoat