Evaluation of Replicated Dynamic Random Access Memory Cell Patterns using X-Ray Lithography
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-12-30
著者
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Nomura H
Toshiba Corp. Yokohama Jpn
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Kikuchi Y
Aset Super‐fine Sr Lithography Lab. Kanagawa Jpn
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Kikuchi Yukiko
Aset Super-fine Sr Lithography Laboratory Co Ntt Telecommnications Energy Laboratories
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Kikuchi Yukiko
Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At
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Komeya Katutoshi
Graduate School Of Environment And Information Science Yokohama National University
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Kondo Kazuhiro
Fujitsu Laboratories Ltd.
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Kondo K
Fujitsu Laboratories Ltd.
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Kikuchi Yukiko
Toshiba Corporation R&d Center
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MUROOKA Ken-ichi
Toshiba Corporation, R&D Center
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SUGHIARA Shinji
Toshiba Corporation, R&D Center
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MITSUI Soichiro
Toshiba Corporation, R&D Center
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NOMURA Hiroshi
Toshiba Corporation, R&D Center
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KONDO Kenzo
Toshiba Corporation, R&D Center
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SHINO Tomoaki
Toshiba Corporation, R&D Center
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KAWAGUCHIYA Hitomi
Toshiba Corporation, Microelectronics Engineering Laboratory
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SUNOUCHI Kazumasa
Toshiba Corporation, Microelectronics Engineering Laboratory
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DEGUCHI Kimiyoshi
Nippon Telegraph and Telephone Corporation, NTT LSI Laboratories
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MIYOSHI Kazunori
Nippon Telegraph and Telephone Corporation, NTT LSI Laboratories
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FUKUDA Makoto
Nippon Telegraph and Telephone Corporation, NTT LSI Laboratories
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Shino Tomoaki
Toshiba Corporation R&d Center
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Nomura H
Laboratory Of Chemistry Department Of Natural Science School Of Science And Technology Tokyo Denki U
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Mitsui Soichiro
Toshiba Corporation R&d Center
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Fukuda Makoto
Nippon Telegraph And Telephone Corporation Ntt Lsi Laboratories
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Sughiara Shinji
Toshiba Corporation R&d Center
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Murooka Ken-ichi
Toshiba Corporation R&d Center
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Kawaguchiya Hitomi
Toshiba Corporation Microelectronics Engineering Laboratory
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Miyoshi Kazunori
Nippon Telegraph And Telephone Corporation Ntt Lsi Laboratories
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Sunouchi Kazumasa
Toshiba Corporation Microelectronics Engineering Laboratory
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Deguchi Kimiyoshi
Nippon Telegraph And Telephone Corporation Ntt Lsi Laboratories
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Sugihara Shinji
Toshiba Corporation, R&D Center
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Sugihara Shinji
Toshiba Corporation, R&D Center
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