Nanometer-Scale Lithography on the Oligosilane Langmuir-Blodgett Film

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1997-12-15

著者

• Tanaka Kazuyoshi

  Department of Biofunctional Informatics, Graduate School of Health Care Sciences, Tokyo Medical and

• SATO Toshiro

  Shinshu University

• TAMAMUSHI Shuichi

  College of General Education, University of Tokyo

• Sato T

  Mitsubishi Chemical Corp. Ibaraki Jpn

• Sato T

  Faculty Of Engineering Niigata University

• Shimidzu T

  Department Of Molecular Engineering Graduate School Of Engineering Kyoto University

• Segawa Hiroshi

  The Authors Are With System Lsi Development Center Mitsubishi Electric Corporation

• MARUYAMA Hiroyuki

  Department of Molecular Engineering, Graduate School of Engineering, Kyoto University

• KOSAI Nobuyuki

  Department of Molecular Engineering, Graduate School of Engineering, Kyoto University

• SATO Tadatake

  Department of Molecular Engineering, Graduate School of Engineering, Kyoto University

• SAGISAKA Shigehito

  Department of Molecular Engineering, Graduate School of Engineering, Kyoto University

• SEGAWA Hiroshi

  Department of Molecular Engineering, Graduate School of Engineering, Kyoto University

• SHIMIDZU Takeo

  Department of Molecular Engineering, Graduate School of Engineering, Kyoto University

• Kosai Nobuyuki

  Department Of Molecular Engineering Graduate School Of Engineering Kyoto University

• Maruyama Hiroyuki

  Department Of Mechanical Engineering Graduate School Of Engineering Osaka University

• Sato H

  Ntt Microsystem Integration Laboratories

• Segawa Hiroshi

  Department Of Applied Chemistry Graduate School Of Engineering The University Of Tokyo

• Sato T

  Shinshu University

• Tanaka Kazuyoshi

  Department Of Biofunctional Informatics Graduate School Of Health Care Sciences Tokyo Medical And De

• Maruyama Hiroyuki

  Department Of Chemical Engineering Kyoto University

• Sagisaka Shigehito

  Department Of Molecular Engineering Graduate School Of Engineering Kyoto University

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