Proximity Correction for Fabricating a Chirped Diffraction Grating by Direct-Writing Electron-Beam Lithography
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概要
- 論文の詳細を見る
This paper describes a proximity correction for fabricating a chirped diffraction grating by direct-writing electron-beam lithography. The electron dose distribution is optimized by calculation with an electron-scatter simulator and a resist development simulator. These simulators are based on the Monte Carlo method and a cell removal model, respectively. To avoid an excessive increase in calculation time, the calculation was performed with $100\,\text{nm}\times 100\,\text{nm}$ square cells at an accuracy larger than that desired. Also, the resist profile was estimated accurately by adopting the interpolation with the resultant cell profile. In the case of a chirped period grating of 5 mm in width, it took 24 h to calculate the optimum electron dose profile. Moreover to investigate the validity of this correction method a chirped period grating of 0.1 mm in width was fabricated with the calculated dose profile.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-09-15
著者
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OKANO Masato
New Technology Development Group, NALUX Co., Ltd.
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YAMAMOTO Kazuya
New Technology Development Group, NALUX Co., Ltd.
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YOTSUYA Tsutom
Technology Research Institute of Osaka Prefecture
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Kikuta Hisao
Department Of Mechanical Engineering College Of Engineering University Of Osaka Prefecture
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Hirai Yoshihiko
Department Of Bioscience And Biotechnology Faculty Of Agriculture Shinshu University
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Yotsuya Tsutom
Technology Research Institute of Osaka Prefecture, 2-7-1, Ayumino, Izumi, Osaka 594-1157, Japan
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Yamamoto Kazuya
New Technology Development Group, NALUX Co., Ltd., 2-1-7, Yamazaki, Shimamoto-cho, Mishima, Osaka 618-0001, Japan
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Okano Masato
New Technology Development Group, NALUX Co., Ltd., 2-1-7, Yamazaki, Shimamoto-cho, Mishima, Osaka 618-0001, Japan
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Hirai Yoshihiko
Department of Mechanical Systems Engineering, College of Engineering, Osaka Prefecture University, 1-1, Gakuen-cho, Sakai, Osaka 599-8531, Japan
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Kikuta Hisao
Department of Mechanical Systems Engineering, College of Engineering, Osaka Prefecture University, 1-1, Gakuen-cho, Sakai, Osaka 599-8531, Japan
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