Low-Reflection Microstructure Formed by Sol-Gel Process
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概要
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Low-reflection microstructures were formed by the use of a two-beam interference patterning on a photosensitive ZrO_2 gel film. Gel films coated on SiO_2 glass were exposed to an interference fringe of 325 nm He-Cd laser beams. The substrate was rotated by 90℃ between the first and second irradiation steps. Island and lattice type periodic two-dimensional structures with a pitch of 1 μm were formed after the irradiation followed by leaching with ethanol. Reflectance of 0.1% for an optically polished SiO_2 surface was attained at around a 1750 nm wavelength by the formation of an island-type microstmcture. The transmission spectrum was successfully simulated by the rigorous coupled wave analysis. The heat treatment of the microstructure up to a temperature of 200℃ was possible in an ambient atmosphere without a conspicuous increase in reflectance.
- 2002-08-15
著者
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Nishii Junji
Optoelectronics Glass Group Photonics Research Institute National Institute Of Advanced Industrial S
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Kintaka K
National Inst. Advanced Industrial Sci. And Technol. Osaka Jpn
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Kintaka Kenji
Optoelectronics Glass Group Photonics Research Institute National Institute Of Advanced Industrial S
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Mizutani Akio
Department Of Anesthesiology Graduate School Of Medicine Oita University
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Mizutani A
Osaka Prefecture Univ. Osaka Jpn
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Tohge Noboru
Department Of Applied Chemistry College Of Engineering University Of Osaka Prefecture
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Mizutani Akio
Department Of Mechanical Systems Engineering Graduate School Of Engineering Osaka Prefecture Univers
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Nishi Junji
Optoelectronics Glass Group Photonics Research Institute National Institute Of Advanced Industrial S
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Kikuta Hisao
Department Of Mechanical Engineering College Of Engineering University Of Osaka Prefecture
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Hasegawa Masaya
Department Of Metallurgical Engineering Faculty Of Science And Engineering Kinki University
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Hasegawa Masaya
Department Of Hospital Pharmacy Nagoya University Branch Hospital
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TOHGE Nobora
Department of Metallurgical Engineering, Faculty of Science and Engineering, Kinki University
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NOMA Naoki
Department of Metallurgical Engineering, Faculty of Science and Engineering, Kinki University
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Kikuta Hisao
Department Of Mechanical Systems Engineering Graduate School Of Engineering Osaka Prefecture Univers
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Noma Naoki
Department Of Metallurgical Engineering Faculty Of Science And Engineering Kinki University
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Tohge Nobora
Department Of Metallurgical Engineering Faculty Of Science And Engineering Kinki University
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NOMA Naoki
Department of Applied Chemistry, Faculty of Engineering, Osaka University
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