Force Microscopy Using Common-Path Optical-Heterodyne Interferometer
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概要
- 論文の詳細を見る
This paper proposes a common-path optical-heterodyne interferometer for developing a very stable force microscope. The deflections of the force-sensing cantilever are detected by the optical heterodyne method which reduces low-frequency noise. The optical system is a common-path interferometer using a Wollaston prism, which reduces the effects of mechanical vibrations and perturbation of the optical path length. In this paper, we proposed the optical system, constructed a system and measured the surface profile of optical disk grooves.
- 社団法人応用物理学会の論文
- 1991-03-15
著者
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Kikuta Hisao
Department Of Mechanical Engineering College Of Engineering University Of Osaka Prefecture
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Iwata Koichi
Department Of Mechanical Engineering College Of Engineering University Of Osaka Prefecture
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ASAI Shigeki
Department of Mechanical Engineering, College of Engineering, University of Osaka Prefecture
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YASUKOCHI Hiroyuki
Department of Mechanical Engineering, College of Engineering, University of Osaka Prefecture
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Asai Shigeki
Department Of Mechanical Engineering College Of Engineering University Of Osaka Prefecture
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Iwata Koichi
Department Of Chemistry And Research Centre For Spectrochemistry School Of Science The University Of
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Yasukochi Hiroyuki
Department Of Mechanical Engineering College Of Engineering University Of Osaka Prefecture
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