Mold Design and Fabrication for Surface Relief Gratings by Glass Nanoimprint
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概要
- 論文の詳細を見る
Mold shape has been optimized to fabricate one-dimensional glass gratings with a high aspect ratio. Comparison of experimental and simulated results demonstrated that a periodic groove with a tilted sidewall, a parabolic top tooth, and a large width was preferable to imprint high-aspect-ratio gratings on a glass surface. In particular, a mold with a parabolic top tooth and a wide groove was effective to increase the aspect ratio. In the case of a mold with a 500 nm period, a grating of 540 nm height could be imprinted under the respectively optimized imprinting parameters of 430 °C, 5 MPa, and 5 min.
- 2009-06-25
著者
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Nishii Junji
National Inst. Of Advanced Industrial Sci. And Technol.
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Kintaka Kenji
National Inst. Of Advanced Industrial Sci. And Technol.
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Mori Toshiharu
Konica Minolta Opto Inc.
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Hirai Yoshihiko
Department Of Bioscience And Biotechnology Faculty Of Agriculture Shinshu University
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Kimoto Yoshihisa
Department Of Materials Science Graduate School Of Engineering Osaka Prefecture University
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Kimoto Yoshihisa
College Of Engineering Graduate School Of Osaka Prefecture University
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KASA Haruya
National Institute of Advanced Industrial Science and Technology
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Nishii Junji
National Institute of Advanced Industrial Science and Technology, Ikeda, Osaka 563-8577, Japan
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Hirai Yoshihiko
Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
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Hotou Norihito
Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
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Kimoto Yoshihisa
Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
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