Surface Modification of Densified Silica Glass by CO Laser Irradiation
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概要
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Surface modification was performed on high-pressure densified silica glass by CO laser irradiation. Microbumps were formed on the silica glass surface due to the relaxation of the compacted structure by the irradiation. The relaxed area reached a depth of about 40 μm, and the volume expansion estimated from the relaxed area was consistent with the volume expansion at the surface. The microbumps were arrayed at a minimum interval of 15 μm, which acted as a microlens array. Moreover, microbumps were formed successfully on both sides of the thin glass plate by irradiation from one side.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-03-15
著者
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KITAMURA Naoyuki
National Institute of Advanced Industrial Science and Technology
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Fukumi Kohei
National Inst. Of Advanced Industrial Sci. And Technol.
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Nishii Junji
National Inst. Of Advanced Industrial Sci. And Technol.
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Nishii Junji
National Institute of Advanced Industrial Science and Technology, 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan
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