SiO2-Based Hybrid Diffractive--Refractive Lenses Fabricated by Femtosecond Laser-Assisted Micromachining
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概要
- 論文の詳細を見る
In this study, we created nonplanar structures of inorganic optical materials by femtosecond (fs) laser lithography-assisted micromachining, which is a combined process of nonlinear lithography and plasma etching. Three-dimensional patterns, formed inside a positive-tone resist by fs laser exposure, were transferred to the underlying nonplanar substrates by plasma etching. This process enables fabrication of Si lines with a constant width of 5 μm, even on a 65-μm-high step. We demonstrated the fabrication of SiO2-based micro-Fresnel zone plates on convex lenses. This hybridization shifted the focal length of the lens by 200 μm, which was consistent with the theoretical value.
- Japan Society of Applied Physicsの論文
- 2008-12-25
著者
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NISHII Junji
National Institute of Advanced Industrial Science and Technology
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Nishii Junji
National Inst. Of Advanced Industrial Sci. And Technol.
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Kawahara Toshio
Center Of Applied Superconductivity And Sustainable Energy Research Chubu University
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Hirata Yoshinori
Division Of Materials And Manufacturing Science Graduate School Of Engineering Osaka University
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Mizoshiri Mizue
Division of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University, S
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Nishiyama Hiroaki
Division of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University, S
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Nishiyama Hiroaki
Division Of Materials And Manufacturing Science Graduate School Of Engineering Osaka University
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Mizoshiri Mizue
Division Of Materials And Manufacturing Science Graduate School Of Engineering Osaka University
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Hirata Yoshinori
Division of Manufacturing Science, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan
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