Near-Infrared Polarizer with Tungsten Silicide Wire Grids
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概要
- 論文の詳細を見る
We fabricated a near-infrared wire-grid polarizer consisting of a 230-nm-pitch tungsten silicide (WSi) grating on a SiO2 substrate using two-beam interference lithography and dry etching. The transverse magnetic (TM) polarization transmittance of the fabricated polarizer exceeded 80% in the 1000--1600-nm wavelength range. The extinction ratio was higher than 20 dB in the 650--1500-nm wavelength range. We also measured the extinction coefficient $\kappa$ of WSi and verified that WSi is a suitable polarizing material in the near-infrared range.
- 2011-01-25
著者
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Fukumi Kohei
National Inst. Of Advanced Industrial Sci. And Technol.
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Yamada Itsunari
Department Of Electrical Engineering Osaka University
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Nishii Junji
Research Institute For Electronic Science Hokkaido University
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Saito Mitsunori
Department Of Electrical Communications Tohoku University
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Yamada Itsunari
Department of Electronic Systems Engineering School of Engineering, The University of Shiga Prefecture, Hikone, Shiga 522-8533, Japan
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Fukumi Kohei
National Institute of Advanced Industrial Science and Technology, Ikeda, Osaka 563-8577, Japan
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Nishii Junji
Research Institute for Electronic Science, Hokkaido University, Sapporo 060-0812, Japan
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Saito Mitsunori
Department of Electronics and Informatics, Ryukoku University, Otsu 520-2194, Japan
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