Nano-Imprint Lithography Using Replicated Mold by Ni Electroforming
スポンサーリンク
概要
- 論文の詳細を見る
In nano-imprint lithography, durability of the mold is one of the most important factors for industrial application. We demonstrate replicated mold fabrication for integrated fine patterns based on a SiISiO_2 master mold. The replication is performed by Ni electroless plating and a Ni electroforming process for a 1 in. ^2 field. Fine patterns as small as 250 nm in width and 270 nm in height have been successfully replicated without fatal defects such as cracks or voids. Using the replicated mold, fine patterns have been successfully obtained by imprint lithography. The surface roughness of the replicated mold is relatively poor compared with that of the master mold because of the micrograms of the Ni electroless plating layer. However, the quantitative values of the surface roughness of both the replicated mold and the imprinted resist are sufficiently small for practical usage.
- 社団法人応用物理学会の論文
- 2002-06-30
著者
-
平井 義彦
大阪府立大学大学院工学研究科
-
HIRAI Yoshihiko
Department of Mechanical Systems Engineering, College of Engineering, Osaka Prefecture Universit
-
HARADA SATOSHI
Department of Chemical Engineering and Materials Science, Doshisha University
-
Tanaka Yoshiki
Tottori Sanyo Electric. Co. Ltd.
-
Tanaka Yoshio
Department of Pharmacology, Faculty of Pharmaceutical Sciences, Toho University
-
平井 義彦
大阪府立大学 大学院工学研究科 電気・情報系専攻
-
Hirai Y
College Of Engineering Graduate School Of Osaka Prefecture University
-
Tanaka Yoshio
Department Of Chemical Pharmacology Toho University Faculty Of Pharmaceutical Sciences
-
HARADA Satoshi
Osaka Prefecture University
-
ISAKA Satoshi
Research and Development Division, Hikifune Co. Ltd
-
KOBAYASHI Michio
Research and Development Division, Hikifune Co. Ltd
-
Tanaka Yukihisa
Department Of Electrical Electronics And Information Engineering Kanagawa University
-
Isaka Satoshi
Research And Development Division Hikifune Co. Ltd
-
Harada Satoshi
Department Of Chemical Engineering And Materials Science Doshisha University
-
Hirai Yoshihiko
Department Of Bioscience And Biotechnology Faculty Of Agriculture Shinshu University
-
Kobayashi Michio
Research And Development Division Hikifune Co. Ltd
-
Tanaka Yoshio
Department Of Applied Chemistry Faculty Of Engineering Yokohama National University
関連論文
- 403 ナノインプリント法による3次元多層構造の作製(GS-16 精密計測・精密加工)
- ナノインプリントの基礎と光学応用
- 細胞のマイクロ粘弾性解析
- 静電駆動マイクロカンチレバーのたわみ変位, たわみ速度制御 : 制御器の遅れ特性を考慮した場合
- 走査型プローブ顕微鏡のフォースモジュレーション法による高分子の粘弾性特性評価
- 分子動力学法による欠陥のあるカーボンナノユーブの力学的特性
- ナノ・インプリント法によるガラス表面の微細加工
- 826 静電駆動マイクロカンチレバーの位置決め・運動制御
- 713 分子動力学法による音叉型単結晶微構造体の振動解析
- 水中に置かれた生体の走査型プローブ顕微鏡を用いた粘弾性評価法
- 静電駆動マイクロカンチレバーの位置決め・運動制御
- ナノ・インプリント法による微細構造の形成
- 919 水中に置かれた生体の原子間力顕微鏡を用いた粘弾性評価(GS-2 バイオエンジニアリング(2))
- 216 静電駆動マイクロカンチレバーの位置決め・運動制御(GS-10 制御システム)
- 1118 水中に置かれた生体の原子間力顕微鏡による粘弾性評価法(OS-5 リモデリング・マイクロバイオメカニクス)
- ナノインプリントリソグラフィーによるモルフォブルー量産技術の開発
- Blocking effect of NIP-142 on the KCNQ1/KCNE1 channel current expressed in HEK293 cells
- 回折光学素子作製のための電子ビーム近接効果補正法の有効性と限界
- Proximity Correction for Fabricating a Chirped Diffraction Grating by Direct-Writing Electron-Beam Lithography
- Fabrication of Diffractive Optical Elements on a Si Chip by Imprint Lithography using Novel Mold (特集 複雑な構造を多様な材料で実現する技術)
- Automatic Dose Optimization System for Resist Cross-Sectional Profile in a Electron Beam Lithography
- Effect of interfacial structures on ionic conductivity in particle-dispersed composite electrolytes
- Blocking Effect of NIP-142 on the KCNQ1/KCNE1 Channel Current Expressed in HEK293 Cells
- Purification and Characterization of a Novel Fungal α-Glucosidase from Mortierella alliacea with High Starch-hydrolytic Activity(Biochemistry & Molecular Biology)
- 熱インプリント法におけるモールドの側壁ラフネスと離型性の関係
- 移植法によるリソグラフィレスマイクロマシン作製プロセスの開発
- リソグラフィを用いない新規なカンチレバー作製プロセス
- 新しい離型層を用いた付着法によるNiカンチレバーの作製
- 金属パターン移植法による横型カンチレバーの作製
- Species Difference in the Contribution of T-Type Calcium Current to Cardiac Pacemaking as Revealed by R(-)-Efonidipine
- シランカップリング剤のナノインプリントへの応用 (プリント基板、封止材料分野でのシランカップリング剤の選び方、使い方、分析ノウハウ)
- Effect of NIP-142 on Potassium Channel α-Subunits Kv1.5, Kv4.2 and Kv4.3, and Mouse Atrial Repolarization
- MaxiK channel-triggered negative feedback system is preserved in the urinary bladder smooth muscle from streptozotocin-induced diabetic rats
- Involvement of the Na^+/Ca^ Exchanger in the Automaticity of Guinea-Pig Pulmonary Vein Myocardium as Revealed by SEA0400
- 917 キャスティング法によるPDMSの高アスペクト比毛群構造の作製(GS-16 MEMS(2))
- ナノ・インプリント技術のバイオテクノロジーへの応用 (特集 バイオテクノロジーイノベーション(part1)単細胞解析をめざしたバイオと異分野の融合がもたらすブレークスルー技術の新潮流)
- Inhibition of Agonist-Induced Positive Inotropy by a Selective Rho-Associated Kinase Inhibitor, Y-27632
- Pharmacological Evidence for Involvement of Phospholipase D, Protein Kinase C, and Sodium-Calcium Exchanger in α-Adrenoceptor-Mediated Negative Inotropy in Adult Mouse Ventricle
- Fluconazole-Resistant Pathogens Candida inconspicua and C. norvegensis : DNA Sequence Diversity of the rRNA Intergenic Spacer Region, Antifungal Drug Susceptibility, and Extracellular Enzyme Production
- Role of BK Channels in Testosterone-Induced Relaxation of the Aorta in Spontaneously Hypertensive Rats(Pharmacology)
- Novel Mesogenic Polymer Stabilized Ferroelectric Liquid Crystal Display Device Exhibiting V-Shaped Electrooptic Characteristics : Structure and Mechanical and Thermal Properties of Condensed Matter
- Effect of Ion Trapping Films on the Electrooptic Characteristics of Polymer-Stabilized Ferroelectric Liquid Crystal Display Exhibiting V-Shaped Switching
- Glibenclamide-Sensitive Hypotension Produced by Helodermin Assessed in the Rat
- Flow-Dependent Regulation of Nitric Oxide Formation in the Isolated Canine Mesenteric Arterial Bed
- Flow Regulates Vasodilator Responses to Acetylcholine in the Isolated Canine Mesenteric Arterial Bed
- POTENTIATION BY BOVINE SERUM ALBUMIN (BSA) OF ENDOTHELIUM-DEPENDENT VASODILATOR RESPONSE TO ACETYL GLYCERYL ETHER PHOSPHORYLCHOLINE (AGEPC)
- Chirality Dependence of Mechanical Properties of Single-Walled Carbon Nanotubes under Axial Tensile Strain
- Molecular Dynamics Studies on Mechanical Properties of Carbon Nano Tubes with Pinhole Defects
- Preparation of Four Geometric Isomers of 4,6-Hexadecadienol, -dienal, and -dienyl Acetate and Their Electro-Antennographic Activity toward Male Eri-Silk Moths
- Studies on the mechanisms underlying β-adrenoceptor-mediated relaxation of rat abdominal aorta
- Nitric Oxide (NO) Primarily Accounts for Endothelium-Dependent Component of β-Adrenoceptor-Activated Smooth Muscle Relaxation of Mouse Aorta in Response to Isoprenaline
- Resonance Characteristics of Micro Cantilever in Liquid
- Comparison of the Inhibitory Effects of Docosahexaenoic Acid (DHA) on U46619-and Phenylephrine-Induced Contractions in Guinea-Pig Aorta(Pharmacology)
- MaxiK channel roles in blood vessel relaxations induced by endothelium-derived relaxing factors and their molecular mechanisms
- β1-Subunit of MaxiK Channel in Smooth Muscle : a Key Molecule Which Tunes Muscle Mechanical Activity
- β_1-Adrenoceptor-mediated relaxation with isoprenaline and the role of MaxiK channels in guinea-pig esophageal smooth muscle
- MaxiK Channel Mediates β_2-Adrenoceptor-activated Relaxation to Isoprenaline through cAMP-dependent and -independent Mechanisms in Guinea-pig Tracheal Smooth Muscle
- The β_3-Adrenoceptor-Mediated Relaxation Induced by Dopamine in Guinea Pig Taenia Caecum
- A Proposal of the Composite Collector Type Hybrid Mode Model of Thermionic Energy Converter and Production of the Functionally Graded Material Structured Collector
- Estimation of Receiving Waveform of Ultrasonic Aerial Back Sonar Calculated by Finite Difference Time Domain Method (Short Note)
- ナノインプリント
- 次世代プリンティング・パターニング(ナノインプリント法によるマイクロ・ナノパターニング)
- ナノインプリントの発展と今後の展望
- ナノインプリントリソグラフィの基本と応用
- ナノインプリンティング法による微細加工
- ナノインプリンティング法によるナノ構造体の創成(メカニカルリソグラフィ)
- ナノインプリント法によるマイクロ・ナノ構造の成形
- ナノインプリント技術
- ナノ・インプリント法による微細構造形成
- Functional Contribution of Voltage-Dependent and Ca^2+-Activated K^+ (BK_ca) Channels to the Relaxation of Guinea-Pig Aorta in Response to Natriuretic Peptides
- Fine Pattern Fabrication on a Polymer Plate by Direct Imprint Lithography (特集 複雑な構造を多様な材料で実現する技術)
- Nano-Imprint Lithography Using Replicated Mold by Ni Electroforming
- Adrenaline produces the relaxation of guinea-pig airway smooth muscle primarily through the mediation of β_2-adrenoceptors
- Phospholipase C Inhibitors Suppress Spontaneous Mechanical Activity of Guinea Pig Urinary Bladder Smooth Muscle(Pharmacology)
- The β_2- and β_3-Adrenoceptor-Mediated Relaxation Induced by Fenoterol in Guinea Pig Taenia Caecum
- Imprint/Photo Hybrid Lithography Using Conventional Contact Aligner
- H2 Receptor-Mediated Positive Inotropic Effect of Histamine in Neonatal Guinea-Pig Left Atria
- Spaces having $\sigma$-compact-finite k-networks(General Topology and Related Problems)
- PLATELET ACTIVATING FACTOR ANALOGUES : LACK OF CORRELATION BETWEEN THEIR ACTIVITIES TO PRODUCE HYPOTENSION AND ENDOTHELIUM-MEDIATED VASODILATION
- 熱ナノインプリント (特集:ナノインプリントによる光学デバイス)
- ナノインプリント法の研究動向 (特集1 ナノテクノロジー)
- Analysis Based on the Wavelet Transform for Ep Type Brain Wave
- Analysis of Effective Work Function of Electrodes in Thermionic Energy Converters and Deposition of Functional Emitter Materials
- Output Characteristics of Hybrid Mode Thermionic Energy Converter
- Performance Characteristics of Ignited Mode Transitions in the Hybrid Mode Thermionic Energy Converters
- ROLE OF CALCIUM IONS AND ENDOTHELIUM IN THE STRETCH-INDUCED CONTRACTILE ACTIVATION OF VASCULAR TISSUES
- Si Etching with High Aspect Ratio and Smooth Side Profile for Mold Fabrication
- Effects of aging on α_1-adrenoceptor mechanisms in the isolated mouse aortic preparation
- Electrophysiological and Pharmacological Characteristics of Triggered Activity Elicited in Guinea-Pig Pulmonary Vein Myocardium
- Update on Angiogenic Potential of Neural Stem Cells
- Epoxy Resins from Alkylbenzene-Formaldehyde Resins
- Determination of Epoxide by Hydrochloric Acid-N, N-Dimethylformamide Method
- ナノパターンー括転写を可能にするナノインプリント技術の開発と産業応用
- METRIZABILITY OF CERTAIN POINT-COUNTABLE UNIONS
- Mold Design and Fabrication for Surface Relief Gratings by Glass Nanoimprint
- Proximity Correction for Fabricating a Chirped Diffraction Grating by Direct-Writing Electron-Beam Lithography
- A Simulation of Energy-Filtered Backscattered Electron Signals from Subsurface Cu Interconnect Structures
- Analysis of Charging Phenomena of Polymer Films on Silicon Substrates under Electron Beam Irradiation
- Molecular Dynamics Study of Yield Stress of Si Mold for Nanoimprint Lithography
- Molecular Dynamics Study of Nanoimprint Lithography for Glass Materials