Molecular Dynamics Study of Yield Stress of Si Mold for Nanoimprint Lithography
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概要
- 論文の詳細を見る
Molecular dynamics studies are carried out to investigate the fracture mechanism of a crystalline Si mold for nanoimprint lithography (NIL). The stress–strain characteristics are evaluated for mold models with various crystalline orientations, and temperature effects on strength are calculated. It is found that the behavior of the fracture and the yield stress of the mold are strongly associated with the configurations of the {111} planes in the mold. The simulation results indicate that crystals with a {100} top surface are more suitable for a mold with arbitrary patterns than those with a {110} top surface because of the weaker dependence of yield stress on crystalline orientation.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-04-25
著者
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Tada Kazuhiro
Department Of Engineering Sciences Nagoya Institute Of Technology:nippon Electric Co. Ltd.
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Kawata Hiroaki
Department Of Electronics College Of Engineering University Of Osaka Prefecture
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Hirai Yoshihiko
Department Of Bioscience And Biotechnology Faculty Of Agriculture Shinshu University
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Kimoto Yoshihisa
Department Of Materials Science Graduate School Of Engineering Osaka Prefecture University
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Kimoto Yoshihisa
College Of Engineering Graduate School Of Osaka Prefecture University
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Yasuda Masaaki
Department Of Bioscience And Biotechnology Faculty Of Agriculture University Of Ryukyus
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Kawata Hiroaki
Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
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Kimoto Yoshihisa
Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
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Tada Kazuhiro
Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
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Tada Kazuhiro
Department of Applied Chemistry, Faculty of Engineering, Osaka University
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YASUDA Masaaki
Department of Agricultural Chemistry, University of the Ryukyus
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