Holographic Lithography with Endpoint Detection of Resist Development

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-07-15

著者

• Murata Kei

  Storage Technologies Research Center Victor Company Of Japan Limited

• MURATA Kenji

  Department of Applied Physics, Faculty Engineering, Osaka University

• MURATA Kenji

  Aichi Works Taketoyo Plant, NOF Co., Ltd.

• Kawata H

  Department Of Physics And Electronics Gra4uate School Of Engineering Osaka Prefecture University

• KAWATA Hiroaki

  Department of Physics and Electronics, Osaka Prefecture University

• KASAMATSU Nobuo

  Department of Physics and Electronics, College of Engineering, University of Osaka Prefecture

• Murata K

  Aichi Works Taketoyo Plant Nof Co. Ltd.

• Murata Kenji

  Department Of Animal Science University Of California

• Kawata Hiroaki

  Department Of Electronics College Of Engineering University Of Osaka Prefecture

• Kasamatsu Nobuo

  Department Of Physics And Electronics College Of Engineering University Of Osaka Prefecture

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