Molecular Dynamics Study of Nanoimprint Lithography for Glass Materials
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概要
- 論文の詳細を見る
Molecular dynamics studies are carried out to investigate the deformation mechanism of glass materials for nanoimprint lithography (NIL). The filling process of glass into the mold cavity and the stick slip phenomena during the mold release are investigated in atomic scale. The relationship between displacement of the mold and applied pressure to the mold are evaluated in NIL including both deformation and demolding processes. The dependence of the required pressure for full filling on the glass thickness and the line width of the mold cavity are investigated. In addition, fracture of glass pattern during the mold release is studied.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-06-25
著者
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Tada Kazuhiro
Department Of Engineering Sciences Nagoya Institute Of Technology:nippon Electric Co. Ltd.
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Kawata Hiroaki
Department Of Electronics College Of Engineering University Of Osaka Prefecture
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Hirai Yoshihiko
Department Of Bioscience And Biotechnology Faculty Of Agriculture Shinshu University
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Kimoto Yoshihisa
Department Of Materials Science Graduate School Of Engineering Osaka Prefecture University
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Kimoto Yoshihisa
College Of Engineering Graduate School Of Osaka Prefecture University
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Yasuda Masaaki
Department Of Bioscience And Biotechnology Faculty Of Agriculture University Of Ryukyus
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Hirai Yoshihiko
Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
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Kimoto Yoshihisa
Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
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Tada Kazuhiro
Department of Applied Chemistry, Faculty of Engineering, Osaka University
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YASUDA Masaaki
Department of Agricultural Chemistry, University of the Ryukyus
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