Long Ni Cantilever Fabrication with New Sacrificial Process

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2002-06-30

著者

• Murata Kei

  Storage Technologies Research Center Victor Company Of Japan Limited

• Yasuda Makoto

  Semiconductor Technology Laboratory Oki Electric Industry Co. Ltd.

• MURATA Kenji

  Department of Applied Physics, Faculty Engineering, Osaka University

• YASUDA Masaaki

  Department of Bioscience and Biotechnology, Faculty of Agriculture, University of the Ryukyus

• MURATA Kenji

  Aichi Works Taketoyo Plant, NOF Co., Ltd.

• MATSUNAGA Takashi

  Department of Medical Informatics, Osaka Medical Center for Cancer and Cardiovascular Diseases

• Kawata H

  Department Of Physics And Electronics Gra4uate School Of Engineering Osaka Prefecture University

• KAWATA Hiroaki

  Department of Physics and Electronics, Osaka Prefecture University

• TABATA Jinpei

  Department of Physics aM Electronics, Osaka Prefecture University

• Murata K

  Aichi Works Taketoyo Plant Nof Co. Ltd.

• Murata Kenji

  Department Of Animal Science University Of California

• Kawata Hiroaki

  Department Of Electronics College Of Engineering University Of Osaka Prefecture

• Yasuda Masaaki

  Department Of Bioscience And Biotechnology Faculty Of Agriculture University Of The Ryukyus

• Yasuda M

  Department Of Bioscience And Biotechnology Faculty Of Agriculture University Of The Ryukyus

• Tabata Jinpei

  Department Of Physics Am Electronics Osaka Prefecture University

• Matsunaga Takashi

  Department Of Medical Informatics Osaka Medical Center For Cancer And Cardiovascular Diseases

• Yasuda Masaaki

  Department Of Bioscience And Biotechnology Faculty Of Agriculture University Of Ryukyus

• Matsunaga Takashi

  Department Of Biopharmaceutics Faculty Of Pharmaceutical Sciences Chiba University

• YASUDA Masaaki

  Department of Agricultural Chemistry, University of the Ryukyus

関連論文

• Effectiveness of Interferon Therapy for Reducing the Incidence of Hepatocellular Carcinoma among Patients with Type C Chronic Hepatitis
• Calculation of X-Ray Production in Alloy Targets by New Approach Using Monte Carlo Method
• X-ray Absorption Near Edge Structure (XANES) of CuInSe_2, Brass and Phosphor Bronze by Photoacoustic Method : Photoacoustic Spectroscopy
• What is the main organ, liver or ovary, by which the components of the egg envelope are produced in fish?
• A Novel Fermented Food Product Prepared from Soybean Protein-Calcium-Gel with Monascus Fungus : Changes in Protein and Nitrogen Compounds during Fermentation
• Expression of the congenital heart disease 5/tryptophan rich basic protein homologue gene during heart development in Medaka fish, Oryzias latipes
• Expression of cardiac myosin light chain 2 during embryonic heart development in medaka fish, Oryzias latipes, and phylogenetic relationship with other myosin light chains
• Experiments on Monopole Ultrasonic Pulse Radiated from Piezoelectric Polymer Film Transducers
• Improved diagnosis of well-differentiated hepatocellular carcinoma with gadolinium ethoxybenzyl diethylene triamine pentaacetic acid-enhanced magnetic resonance imaging and Sonazoid contrast-enhanced ultrasonography
• Fabrication of Glass Stamper for Injection Molding : Media
• Fabrication of Glass Stamper for Injection Molding
• Photoacoustic EXAFS of Solid Phase
• AGE-ASSOCIATED CHANGE IN HEPATIC MICROSOMAL DRUG METABOLIZING ENZYME ACTIVITIES
• A Study on the Conditions for Generation of Monopole Ultrasbnic Pulse by Piezoelectric Polymer Film Transducers
• Long Ni Cantilever Fabrication with New Sacrificial Process
• A Monte Carlo Study of Magnetic Domain Images in a Spin-Polarized Scanning Electron Microscope
• Fabrication of a New Electrostatic Linear Actuator
• Grown-in Microdefects in a Slowly Grown Czochralski Silicon Crystal Observed by Synchrotron Radiation Topography
• In Situ Measurements of the Resist Etch Rate for Submicron Patterns
• Mierodefects in an As-Grown Czoehralski Silicon Crystal Studied by Synchrotron Radiation Section Topography with Aid of Computer Simulation
• Resist Etching with Parellel-Plate RF Plasmas Enhanced by a Cusp Magnetic Field
• Measurement of the Electron Energy Distribution in Asymmetric Radio-Frequency Plasmas with a Self-Compensating Langmuir Probe
• Electrical Properties of Planar RF Discharges Including the Second Harmonic Frequency ( Plasma Processing)
• Observation of Microdefects in As-Grown Czochralski Silicon Crystals by Synchrotron Radiation Topography
• Holographic Lithography with Endpoint Detection of Resist Development
• Numerically Simulated and Experimentally Obtained X-Ray Section Topographs of a Spherical Strain Field in a Floating Zone Silicon Crystal
• Enlargement of Poly-Si Film Grain Size by Excimer Laser Annealing and Its Application to High-Performance Poly-Si Thin Film Transistor
• Synchrotron Radiation Section Topography with Extremely High-Order Reflection and Its Application to the Characterization of MCZ-Silicon Crystals
• Measurement and Analysis of the Static Debye-Waller Factor of Cz-Silicon with Small Oxygen Precipitates : Techniques, Instrumentations and Measurement
• Measurement of the Static Debye-Waller Factor of Silicon Crystals by the Pendellosung Fringe Method
• Laser Patterning Method for Integrated Type a-Si Solar Cell Submodules
• Novel Single-Step Rapid Thermal Oxynitridation Technology for Forming Highly Reliable Electrically Erasable Programmable Read-Only Memory Tunnel Oxide Films
• Kinetics of Rapid Thermal Oxidation of Silicon
• Role of SiN Bond Formed by N_2O-Oxynitridation for Improving Dielectric Properties of Ultrathin SiO_2 Films
• The Production of Recombinant APRP, an Alkaline Protease Derived from Bacillus pumilus TYO-67, by In Vitro Refolding of Pro-enzyme Fixed on a Solid Surface
• Copper-Dependent Production of a Pycnoporus coccineus Extracellular Laccase in Aspergillus oryzae and Saccharomyces cerevisiae
• Analysis of the Spin Polarization of Secondary Electrons Emitted from Permalloy Polycrystals
• A Simulation of Electron Scattering in Magnetic Materials
• A New Type of Ultralight Flexible a-Si Solar Cell
• A Laser Welding and Scribing (LWS) Method for a High-Yield Integrated-Type a-Si Solar Cell
• Methotrexate-related leukoencephalopathy without radiation therapy : Distribution of brain lesions and pathological heterogeneity on two autopsy cases
• A Basic Experimental Study for Imaging by Monopolar Pulse Radiated from Concave Polyvinylidene Fluoride (PVDF) Transducer
• A Measurement on Sensitivity Factors of Polyvinylidene Fluoride (PVDF) Transducers (Short Note)
• Study on the Resolution of the Backscattered Electron Image by the Monte Carlo Method
• Monte Carlo Calculations on Electron Scattering in a Solid Target
• Hepatocellular carcinoma arising from non-cirrhotic nonalcoholic steatohepatitis
• Antihypertensive and Hypocholesterolemic Effects of Tofuyo in Spontaneously Hypertensive Rats
• Heat Transfer Enhancement in Horizontal, Spirally Grooved Evaporator Tubes
• Purification and Properties of a Ribonuclease from a Species of the Genus Monascus
• Successful Transcatheter Coil Embolization of Coronary Artery to Left Ventricular Fistula Associated With Absent Pulmonary Valve With Tricuspid Atresia in Early Infancy
• Idiopathic arterial calcification in infancy with twin-twin transfusion syndrome
• Analysis of Developed Pattern Profiles in X-Ray Lithography with Monochromatic X-Rays
• Mechanism of egg envelope digestion by hatching enzymes, HCE and LCE in medaka, Oryzias latipes
• Imprint/Photo Hybrid Lithography Using Conventional Contact Aligner
• Angiotensin I-Converting Enzyme Inhibitory Peptides Isolated from Tofuyo Fermented Soybean Food(Food & Nutrition Science)
• Sequence of the Gene Encoding an Alkaline Serine Proteinase of Bacillus pumilus TYO-67
• Heterogeneity of Dehydrogenases of Stenotrophomonas maltophilia Showing Dye-linked Activity with Polypropylene Glycols(Microbiology & Fermentation Technology)
• Using Ultrasound for Clinical Observation of the Porcine Ovary Through the Course of the Estrous Cycle and to Monitor Treatment of Ovarian Disease
• X-Ray and Gamma-Ray Emissions from the PSR 1259-63/Be Star System
• Two different unique cardiac isoforms of protein 4.1R in zebrafish, Danio rerio, and insights into their cardiac functions as related to their unique structures
• Purification and Characterization of Heterogeneous Glucoamylases from Monascus purpureus
• Herbicidal and fungicidal activities and identification of potential phytotoxins from Bidens pilosa L. var. radiata Scherff
• Fabrication of 0.2 μm Fine Patterns Using Optical Projection Lithography with an Oil Immersion Lens
• Si Etching with High Aspect Ratio and Smooth Side Profile for Mold Fabrication
• Interaction of Jets with a Supernova Remnant in the SS 433/W50 System
• Monte Carlo Simulations of the Behavior of Energetic Light Ions in Solids
• Depth Distribution of Characteristic X-rays in EPMA Alloy Targets : I. Angular Distribution and f(x)-Curves of Fe K X-rays in Fe-Al Alloy Targets
• Morphological changes in the vascular endothelial cell layer and wall of cerebral aneurysm before and after rupture
• The f(χ)-Curves for FeKα and AlKα X-Rays in the Inclined EPMA Targets of Fe, Al and Fe-Al Alloy
• Uncertainty in the Determination of Depth Distribution of Characteristic X-rays in EPMA Target
• Investigation of Energy Dissipation of Electrons in Al- and Cu-Targets by Monte Carlo Method
• Monte Carlo Simulations on Scattering of Bombarded Ions in Solids
• Measurement of the Electron Energy Distribution in Asymmetric Radio-Frequency Plasmas with a Self-Compensating Langmuir Probe
• A Simulation of Energy-Filtered Backscattered Electron Signals from Subsurface Cu Interconnect Structures
• Analysis of Charging Phenomena of Polymer Films on Silicon Substrates under Electron Beam Irradiation
• Molecular Dynamics Study of Yield Stress of Si Mold for Nanoimprint Lithography
• Molecular Dynamics Study of Nanoimprint Lithography for Glass Materials
• Analysis of Backscattered Electron Signals in X-Ray Mask Inspection
• Study of Imploding Plasma Motion in a Gas-Puff Z-Pinch Plasma as an X-Ray Lithography Source
• A Monte Carlo Calculation of Secondary Electron Emission from Organic Compounds
• Physicochemical properties of eicosane-1,20-bis(trimethylammonium) dibromide in aqueous solution.
• Physicochemical properties of .ALPHA.,.OMEGA.-type surfactant in aqueous solution. Bis(triethylammonium)1,20-eicosanediyl disulfate.

もっと見る 閉じる

スポンサーリンク