A Simulation of Energy-Filtered Backscattered Electron Signals from Subsurface Cu Interconnect Structures
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概要
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The exit energy dependence of backscattered electron signals from subsurface Cu interconnect structures is studied using a Monte Carlo simulation of electron scattering. The exit energies of the backscattered electrons reflect the depth of the Cu layers accessible in the samples and the energy-filtered backscattered electron signals provide more depth information on the sample structures than the total backscattered electron signals. The effects of the sample geometry on the energy-filtered backscattered electron signals are discussed for several structures.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-07-15
著者
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Kawata Hiroaki
Department Of Electronics College Of Engineering University Of Osaka Prefecture
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Hirai Yoshihiko
Department Of Bioscience And Biotechnology Faculty Of Agriculture Shinshu University
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Yasuda Masaaki
Department Of Bioscience And Biotechnology Faculty Of Agriculture University Of Ryukyus
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Suzuki Yusuke
Department Of Biological Production Akita Prefectural University
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Hirai Yoshihiko
Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Sakai, Osaka 599-8531, Japan
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YASUDA Masaaki
Department of Agricultural Chemistry, University of the Ryukyus
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