Influence of Oxygen Flow Ratio on Properties of Zn_2SnO_4 Thin Films Deposited by RF Magnetron Sputtering
スポンサーリンク
概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2005-02-10
著者
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YOTSUYA Tsutom
Technology Research Institute of Osaka Prefecture
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MURAKAMI Shuichi
Technology Research Institute of Osaka Prefecture
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KAKEHI Yoshiharu
Technology Research Institute of Osaka Prefecture
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SATOH Kazuo
Technology Research Institute of Osaka Prefecture
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OKAMOTO Akio
Technology Research Institute of Osaka Prefecture
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URATANI Fumihiro
Technology Research Institute of Osaka Prefecture
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