Characterization of Direct Piezoelectric Effect in 31 and 33 Modes for Application to Vibration Energy Harvester
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概要
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The direct piezoelectric properties of sol--gel-derived Pb(Zr,Ti)O<sub>3</sub> (PZT) films in the longitudinal (31) and transverse (33) modes were investigated to determine the applicability of the film to a piezoelectric vibration energy harvester. For the 31-mode characterization, PZT films were deposited on Pt/Ti/SiO<sub>2</sub>/Si substrates. The direct piezoelectric properties were characterized by the substrate bending method. The $e_{\text{31,f}}$ coefficient of the 3-μm-thick PZT film with morphotropic phase boundary (MPB) composition was calculated to be $-9.1$ C/m2 at a strain of $6\times 10^{-5}$. For the configuration of 33-mode measurement, the PZT films were deposited on SrTiO<sub>3</sub>(STO) substrates without bottom electrodes and characterized in the same manner. In this configuration, the 3-μm-thick (100) PZT film with MPB composition has a larger piezoelectric response than (111) PZT films. The $e_{33}$* coefficient of the (100) PZT film was measured to be 5.4 C/m2. When the PZT film thickness decreased to 1 μm, the coefficient increased to 7.7 C/m2, suggesting that the non polarized region existed near the STO substrate owing to the lateral poling configuration.
- 2011-09-25
著者
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MURAKAMI Shuichi
Technology Research Institute of Osaka Prefecture
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Fujimura Norifumi
Department Of Applied Materials Science Graduate School Of Engineering Osaka Prefecture University
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Yoshimura Takeshi
Department Of Applied Materials Science Graduate School Of Engineering Osaka Prefecture University
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Fujimura Norifumi
Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
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Yoshimura Takeshi
Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
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Miyabuchi Hiroki
Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University, Sakai 599-8531, Japan
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