Direct Piezoelectric Properties of Mn-Doped ZnO Epitaxial Films
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概要
- 論文の詳細を見る
The direct piezoelectric properties of Mn-doped ZnO epitaxial films prepared by pulse laser deposition was investigated. The resistivity of the ZnO films was markedly decreased by Mn doping. The effective transverse piezoelectric coefficient $(e_{31,f})$ of the ZnO films was measured by substrate bending and collecting developed charges. The dependence of induced charge density on applied strain indicates that the obtained piezoelectric response originates from the spontaneous polarization of the Mn-doped ZnO films. The $e_{31,f}$ values of 3 and 5 at. % Mn-doped ZnO films were determined to be $-1.09$ and $-1.10$ C/m2, respectively, which are comparable to the theoretical value.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2010-02-25
著者
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Yoshimura Takeshi
Department Of Applied Materials Science Graduate School Of Engineering Osaka Prefecture University
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Atsushi Ashida
Department of Physics and Electronics, Garaduate School of Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai 599-8531, Japan
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Sakiyama Haruka
Department of Physics and Electronics, Garaduate School of Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai 599-8531, Japan
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Oshio Takeshi
Department of Physics and Electronics, Garaduate School of Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai 599-8531, Japan
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Norifumi Fujimura
Department of Physics and Electronics, Garaduate School of Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai 599-8531, Japan
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Takeshi Oshio
Department of Physics and Electronics, Garaduate School of Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai 599-8531, Japan
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Haruka Sakiyama
Department of Physics and Electronics, Garaduate School of Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai 599-8531, Japan
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Takeshi Yoshimura
Department of Physics and Electronics, Garaduate School of Engineering, Osaka Prefecture University, 1-1 Gakuen-cho, Naka-ku, Sakai 599-8531, Japan
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