Effects of Nitrogen Pressure and RF Power on the Properties of Reactive Magnetron Sputtered Zr-N Films and an Application to a Thermistor

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1992-12-15

著者

• YOTSUYA Tsutom

  Osaka Prefectural Industrial Technology Research Institute

• Yoshitake Masaaki

  Osaka Prefectural Industrial Technology Research Institute

• Yotsuya Tsutomu

  Technology Research Institute Of Osaka Prefecture

• Yotsuya Tsutom

  Osaka Prefectural Industrial Technology Research Insitute

• OGAWA Souichi

  Technology Research Institute of Osaka Prefecture

• Yotsuya T

  Technology Research Institute Of Osaka Prefecture

• OGAWA Soichi

  Osaka Prefectural Industrial Technology Research Institute

• Ogawa S

  Toho Univ. Chiba Jpn

• Yoshitake M

  Technol. Res. Inst. Osaka Prefecture Osaka

関連論文

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• Fabrication of Microcone Array for Antireflection Structured Surface Using Metal Dotted Pattern : Optics and Quantum Electronics
• Automatic Dose Optimization System for Resist Cross-Sectional Profile in a Electron Beam Lithography
• In Situ Formation of Ohmic Contact Electrodes of Cu and Ag onto the Fractured Surface of (Bi, Pb)-Sr-Ca-Cu-O Ceramics
• High-Field Magnetoresistance of Zr-N Film Thermometers(Transport and Fermiology)
• Electrical Resisitivity and High-Field Magnetoresistance of Zr-N Film Thermometers
• Infrared Radiation Detector with YBa_2Cu_3O_x Thin Film
• Effects of Nitrogen Pressure and RF Power on the Properties of Reactive Magnetron Sputtered Zr-N Films and an Application to a Thermistor
• Synthesis of Zr-N Thin Film by Reactive Ion Beam Sputtering
• Fabrication of Bi(Pb)SrCaCuO Thin Film of High-T_c Phase
• Transport Property of (La_A_x)MnO_3 (A=Ca, Sr, Ba)
• Infrared Radiation Detection with YBa_2Cu_3O_ Microbridge
• Synthesis of Wave Plates Using Multilayered Subwavelength Structure
• Development of Deep Gratings for Wavelength Dispersion Applications
• Overwrite on Sputtered Garnet Media Using Magnetic Field Modulation : Media
• Overwrite on Sputtered Garnet Media Using Magnetic Field Modulation
• A CCD Imager on Three Types of P-Wells
• Effects of Ion Species on Reactive-Ion-Beam-Sputtered Zr-N Films
• Effects of Postannealing on Orientation and Crystallinity of P-Type Transparent Conducting CuScO2 Thin Films
• PIXE in Determination of Argon Impurity in Ion Beam Sputter-Deposited Co–Cr Films
• The Contact Resistance of the YBa2Cu3O7-δ-Metal Film System
• High-Energy Ion Beam Analysis of YBa2Cu3Ox Thin Films

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