PIXE in Determination of Argon Impurity in Ion Beam Sputter-Deposited Co–Cr Films
スポンサーリンク
概要
- 論文の詳細を見る
Co–Cr films prepared by the method of argon ion beam sputtering are analyzed by the proton-induced X-ray emission (PIXE) technique. The PIXE spectra show a clear peak of Ar K$\alpha$ X-ray, indicating the existence of impurities. The content of argon impurity is in the order of $10^{2}$ ng, and the content is found to increase as the argon ion beam energy increases and the argon pressure decreases. The argon impurity is attributed to the scattering processes of argon ions at the Co–Cr alloy target surface.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1989-03-20
著者
-
SUZUKI Yoshihiko
Osaka Prefectural Industrial Technology Research Institute
-
OGAWA Soichi
Osaka Prefectural Industrial Technology Research Institute
-
Shoji Fumiya
Electron Beam Laboratory Faculty Of Engineering Osaka University
-
Hanawa Teruo
Electron Beam Laboratory Faculty Of Engineering Osaka University
-
Oura Kenjiro
Electron Beam Laboratory Faculty Of Engineering Osaka University
-
Suzuki Yoshihiko
Osaka Prefecture Industrial Technology Research Institute, 2-1-53, Enokogima, Nishi-ku, 550 Osaka
-
Taniguchi Hideki
Electron Beam Laboratory, Faculty of Engineering, Osaka University, Yamada-Oka, Suita, Osaka 565
-
Kusumoto Osamu
Electron Beam Laboratory, Faculty of Engineering, Osaka University, Yamada-Oka, Suita, Osaka 565
-
Shoji Fumiya
Electron Beam Laboratory, Faculty of Engineering, Osaka University, Yamada-Oka, Suita, Osaka 565
-
Hanawa Teruo
Electron Beam Laboratory, Faculty of Engineering, Osaka University, Yamada-Oka, Suita, Osaka 565
関連論文
- In Situ Formation of Ohmic Contact Electrodes of Cu and Ag onto the Fractured Surface of (Bi, Pb)-Sr-Ca-Cu-O Ceramics
- Ion Beam Analysis of the Concentration and Thermal Release of Hydrogen in Silicon Nitride Films Prepared by ECR Plasma CVD Method : Surfaces, Interfaces and Films
- Effects of Nitrogen Pressure and RF Power on the Properties of Reactive Magnetron Sputtered Zr-N Films and an Application to a Thermistor
- Fabrication of Bi(Pb)SrCaCuO Thin Film of High-T_c Phase
- Gold-Induced Superstructures on Si(100) Surfaces as Observed by LEED-AES
- Temperature Dependence of the Sodium Concentration over the Sodium Tungsten Bronze (Na_WO_3) Surface Studied by LEED
- Effects of Ion Species on Reactive-Ion-Beam-Sputtered Zr-N Films
- Surface Structure of Si(111)-√×√-Ag Studied by Averaged LEED Analysis
- An Interpretation of Discrete Energy Loss in He^+ Ion Scattering from W Surfaces Containing Oxygen
- Deposition of Ag on Si(100) Surfaces as Studied by LEED-AES
- Cylindrical Mirror Analyzer (CMA) with an Axially Integrated ISS-AES Gun for Surface Composition Analysis : Techniques, Instrumentations and Measurement
- Oxygen-Enhanced Surface Segregation of Mn in Cu-Mn and Ag-Mn Alloy Films Studied by ISS/AES : Surfaces, Interfaces and Films
- Detection of Hydrogen on Solid Surfaces by Low-Energy Recoil Ion Spectroscopy
- New Surface Structure of Pd on Si(111) Studied by Low-Energy Ion-Scattering Spectroscopy and LEED-AES
- Atomic Arrangement of the Si(111)-√×√-Ag Structure Derived from Low-Energy Ion-Scattering Spectroscopy
- Ion Channeling Study of SrTiO_3 Substrates and As-Deposited YBa_2Cu_3O_x Thin Films
- PIXE in Determination of Argon Impurity in Ion Beam Sputter-Deposited Co–Cr Films
- The Contact Resistance of the YBa2Cu3O7-δ-Metal Film System
- High-Energy Ion Beam Analysis of YBa2Cu3Ox Thin Films