Detection of Hydrogen on Solid Surfaces by Low-Energy Recoil Ion Spectroscopy
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概要
- 論文の詳細を見る
Direct detection of hydrogen on the topmost surface of an hydrogenated amorphous silicon film has been made using a low-energy recoil ion spectroscopy method. Energies of positive and negative recoil ions (H^+ and H^-) produced by Ne^+ ion bombardment (below 2 keV) have been measured by an electrostatic analyzer and they agree well with those predicted by elastic binary collision model between Ne and H.
- 社団法人応用物理学会の論文
- 1984-09-20
著者
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SHOJI Fumiya
Electron Beam Laboratory, Faculty of Engineering, Osaka University
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OURA Kenjiro
Electron Beam Laboratory, Faculty of Engineering, Osaka University
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HANAWA Teruo
Electron Beam Laboratory, Faculty of Engineering, Osaka University
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Shoji Fumiya
Electron Beam Laboratory Faculty Of Engineering Osaka University
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Hanawa Teruo
Faculty Of Engineering Osaka University:osaka Institute Of Technology
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Hanawa Teruo
Electron Beam Laboratory Faculty Of Engineering Osaka University
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Oura Kenjiro
Electron Beam Laboratory Faculty Of Engineering Osaka University
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Shoji Fumiya
Faculty Of Engineering Osaka University
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Oura Kenjiro
Faculty Of Engineering Osaka University
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