A Novel Method of Sputter Deposition Utilizing a Hot-Cathode Penning Ion Source
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-05-20
著者
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Shoji Fumiya
Faculty Of Engineering Kyushu Kyoritsu University
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Shoji Fumiya
Faculty Of Engineering Osaka Univetsity
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Shoji Fumiya
Faculty Of Engineering Kobe University
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Oura Kenjiro
Faculty Of Engineering Osaka Univetsity
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Oura Kenjiro
Faculty Of Engineering Osaka University
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- A Novel Method of Sputter Deposition Utilizing a Hot-Cathode Penning Ion Source
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