Fabrication of 3-dimensional structure by nanoimprint process
スポンサーリンク
概要
- 論文の詳細を見る
- 2007-09-19
著者
関連論文
- Fabrication of 3-dimensional structure by nanoimprint process
- Impact of Resist Shrinkage and Its Correction in Nanoimprint Lithography
- Numerical and Experimental Analysis of Intermittent Line-and-Space Patterns in Thermal Nanoimprint
- Novel Heterostructured Organic Photovoltaics Formed by Multilayered Direct Nanoimprinting
- Evaluation of Demolding Energy for Various Demolding Modes in Embossing Process
- Fabrication of Imprint Mold with Nanotrench Patterns by Edge Lithography