Effect of Pb Content in Target on Electrical Properties of Laser Ablation Derived Lead Zirconate Titanate Thin Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-09-30
著者
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Wang Zhan-jue
Mechanical Engineering Laboratory Agency Of Industrial Science And Technology Ministry Of Internatti
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MAEDA Ryutaro
Mechanical Engineering Laboratory, Agency of Industrial Science and Technology, Ministry of Internat
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Wang Zhan-jie
Mechanical Engineering Laboratory, Agency of Industrial Science and Technology, Ministry of Internat
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Kikuchi Kaoru
Mechanical Engineering Laboratory, Agency of Industrial Science and Technology, Ministry of Internat
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Kikuchi Kaoru
Mechanical Engineering Laboratory Agency Of Industrial Science And Technology Ministry Of Internatti
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Kikuchi Kaoru
Mechanical Engineering Laboratory Agency Of Industrial Science And Technology Ministry Of Internatio
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Maeda Ryutaro
Mechanical Engineering Laboratory Agency Of Industrial Science And Technology Ministry Of Internatti
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Maeda Ryutaro
Mechanical Engineering Laboratory
関連論文
- X-Ray Diffraction and Scanning Electron Microscopy Observation of Lead Zirconate Titanate Thick Film Formed by Gas Deposition Method
- Room-Temperature Bonding of Si Wafers to Pt Films on SiO_2 or LiNbO_3 Substrates Using Ar-Beam Surface Activation
- Transmission Electron Microscope Observations of Si/Si Interface Bonded at Room Temperature by Ar Beam Surface Activation
- Effect of Surface Roughness on Room-Temperature Wafer Bonding by Ar Beam Surface Activation
- Microfabricated Dynamic Scanning Force Microscope Using a Three Dimensional Piezoelectric T-shape Actuator
- Tip-Scanning Dynamic Force Microscope Using Piezoelectric Cantilever for Full Wafer Inspection
- Effect of Pb Content on Electric Properties of Sol-Gel Derived Lead Zirconate Titanate Thin Films Prepared by Three-Step Heat-Treatment Process
- Deposition and Patterning Technique for Realization of Pb(Zr_, Ti_)O_3 Thick Film Micro Actuator
- Effect of Pb Content in Target on Electrical Properties of Laser Ablation Derived Lead Zirconate Titanate Thin Films
- Evaluation of the Elastic Properties of a Cantilever Using Resonant Frequencies
- A normally closed PDMS (polydimethylsiloxane) microvalve
- Application of Gas Jet Deposition Method to Piezoelectric Thick Film Miniature Actuator