Evaluation of the Elastic Properties of a Cantilever Using Resonant Frequencies
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概要
- 論文の詳細を見る
A method to evaluate Young's modulus and Poison's ratio of a micro-cantilever is demonstrated using resonant frequency measurements of deflection and torsional vibrations. Both vibrations of the cantilever were excited by a new cantilever holder, and they were measured separately using an optical lever. Five modes of resonant frequencies for deflection and three modes for torsion were obtained. Young's modulus and Poison's ratio were estimated by fitting the theoretically calculated resonant frequencies to the experimental results.
- 社団法人応用物理学会の論文
- 1997-05-30
著者
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Nakano S
Mechanical Engineering Lab. Ibaraki Jpn
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YAMANAKA Kazushi
Mechanical Engineering Laboratory
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Nakano Shizuka
Mechanical Engineering Laboratory
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Yamanaka Kazushi
Mechanfical Engineering Laboratory
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MAEDA Ryutaro
Mechanical Engineering Laboratory, Agency of Industrial Science and Technology, Ministry of Internat
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Maeda Ryutaro
Mechanical Engineering Laboratory
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