Evaluation of Surface Defects Using Surface Acoustic Waves Generated by Phase Veilocity Scanning of Laser Interference Fringes
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-05-30
著者
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Sato Hisao
Nitride Semiconductor Co. Ltd.
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Sato H
Research And Development Center Gunze Limited
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Sato Hiroyasu
Faculty Of Engineering Mie University
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Sato Hiroharu
Multimedia Eng. Lab.
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Sato H
Univ. Tokushima Tokushima Jpn
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YAMANAKA Kazushi
Mechanical Engineering Laboratory
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Yamanaka Kazushi
Mechanfical Engineering Laboratory
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Ogiso H
National Institute For Advanced In Terdisciplinary Research:mechanical Engineering Laboratory
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Ogiso Hisato
National Institute Of Advanced Industrial Science And Technology(aist)
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Sato H
Department Of Applied Chemistry Faculty Of Engineering Kumamoto University
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Nishino H
Faculty Of Science And Engineering Aoyama Gakuin University
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SATO Harumichi
Mechanical Engineering Laboratory
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Cho Hideo
Faculty Of Mechanical Engineering Aoyama Gakuin University
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SATO Hisano
Wireless Research Laboratory, Matsushita Elec. Ind., Co.
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NISHINO Hideo
Technical Research Institute, Toppan Printing Co., Ltd.
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Sunagawa Hiromi
Department Of Applied Physics Faculty Of Engineering Tohoku University
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Sato Hisao
Department of Applied Physics, Graduate School of Engineering, Tohoku University
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Ogiso Hisato
National Institute for Advanced In Terdisciplinary Research:Mechanical Engineering Laboratory
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