Evaluation of MeV Si Implanted Si Using Beam Acoustic Method : Ultrasonic Imaging and Microscopy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1991-08-31
著者
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Nakano S
Mechanical Engineering Lab. Ibaraki Jpn
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NAGATA Yoshihiko
Mechanical Engineering Laboratory
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KODA Toshio
Mechanical Engineering Laboratory
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Nakano Shizuka
Mechanical Engineering Laboratory
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Yamanaka Kazushi
Mechanfical Engineering Laboratory
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NAGATA Yujiro
College of Science and Engineering, Aoyama Gakuin University
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Koda T
Mechanical Engineering Laboratory
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Ogiso H
National Institute For Advanced In Terdisciplinary Research:mechanical Engineering Laboratory
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Nagata Y
College Of Science And Engineering Aoyama Gakuin University
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Nagata Yujiro
College Of Science & Engineering Aoyama Gakuin University
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OGISO Hisato
Mechanical Engineering Laboratory
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