Evaluation of Standard Defects Using Surface Acoustic Waves Generated by Phase Velocity Scanning of Laser Interference Fringes

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1997-05-30

著者

• Sato Hisao

  Nitride Semiconductor Co. Ltd.

• Sato H

  Research And Development Center Gunze Limited

• Sato Hiroyasu

  Faculty Of Engineering Mie University

• Nakano S

  Mechanical Engineering Lab. Ibaraki Jpn

• Sato Hiroharu

  Multimedia Eng. Lab.

• Sato H

  Univ. Tokushima Tokushima Jpn

• YAMANAKA Kazushi

  Mechanical Engineering Laboratory

• Nakano Shizuka

  Mechanical Engineering Laboratory

• Yamanaka Kazushi

  Mechanfical Engineering Laboratory

• Ogiso H

  National Institute For Advanced In Terdisciplinary Research:mechanical Engineering Laboratory

• Ogiso Hisato

  National Institute Of Advanced Industrial Science And Technology(aist)

• Sato H

  Department Of Applied Chemistry Faculty Of Engineering Kumamoto University

• Yamanaka K

  Tohoku Univ. Sendai Jpn

• SATO Harumichi

  Mechanical Engineering Laboratory

• SATO Hisano

  Wireless Research Laboratory, Matsushita Elec. Ind., Co.

• Sunagawa Hiromi

  Department Of Applied Physics Faculty Of Engineering Tohoku University

• Sato Hisao

  Department of Applied Physics, Graduate School of Engineering, Tohoku University

• Ogiso Hisato

  National Institute for Advanced In Terdisciplinary Research:Mechanical Engineering Laboratory

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